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Used MRC 603/903/943 Sputtering System Control Boards

Inventory Number: 64755
Now (USD): $1,600.00

MRC Sputtering System Control Boards. Many different model boards available. CALL FOR DETAILS! SEE LIST BELOW. PRICE LISTED IS FOR SINGLE CPU BOARD ONLY. 

Contact us for prices on other boards or for package price.

882-52-000 Intel CPU Boards for 603 903 or 943 model II or III systems. 5 CPU Boards available as well as many other boards for these systems.

ANALOG RACK- 882-48-000 mod E Scan Board, 880-71-000 rev F DC & Heat, 880-18-000 rev R Pressure Mon, 882-18-000 rev H Motion, 880-21-000 rev H Pressure Cont, 880-31-000 rev F Switch, 880-31-000 rev J switch, 880-47-000 switch qty 2, 880-46-000 rev J RF Cont, 880-27-000 rev F RF tune, 882-16-000 rev H Gripper, 880-32-000 rev C Relay.

COMPUTER BOARDS- 880-69-000 rev F Video, 882-44-000 rev O System Intfa, 882-44-000 System Int, 880-70-000 I/O Analog Qty: 4, 880-73-000 Mem Exp Qty: 3, 882-49-000 Intel cpu with clock, 880-74-000 rev L I/O Matrix, 880-69-000 rev H Video

Product Details

Used Neslab HX-75W

Inventory Number: 64808
Now (USD): $3,250.00

Neslab HX-75W Water Chiller from Plasma Therm PECVD Tool. Water cooled refrigeration system requires water cooling of refrigeration compressor. This chiller was removed from a Plasma Therm tool running in the fab. Temperature Range +5 to +35°C. Cooling Capacity 6820 BTU/HR at 20°C. TU-1 Pump Capacity 3GPM at 50 PSI. 208-230V, 1Ph, 60Hz, 30A

Product Details

Used Neslab HX-75W

Inventory Number: 64809
Now (USD): $3,250.00

Neslab HX-75W Water Chiller from Plasma Therm PECVD Tool. Water cooled refrigeration system requires water cooling of refrigeration compressor. This chiller was removed from a Plasma Therm tool running in the fab. Temperature Range +5 to +35°C. Cooling Capacity 6820 BTU/HR at 20°C. TU-1 Pump Capacity 3GPM at 50 PSI. 208-230V, 1Ph, 60Hz, 30A

Product Details

Used Neslab RTE-740

Inventory Number: 64859
Now (USD): $2,500.00

Neslab RTE 740 Low Temperature Refrigerated and Heating Bath Circulator Chiller. Temperature Range: -40°C to 200°C. Digital Plus Controller. Cooling Capacity: 800W at 20°C. Pumping Capacity: 15 lpm at 0’Head. 115V, 1 Ph, 60 Hz, 16A, CE

Product Details

Used Neslab Thermoflex 7500

Inventory Number: 64916
Now (USD): $5,500.00

Neslab Thermoflex 7500 Air Cooled Refrigerated Recirculating Chiller. Temperature rang +5 to +40°C. Cooling capacity at 20°C 7500 W / 25575 BTU. Positive displacement pump 4 GPM at 60 PSI. Reservoir volume 4.75 gallons. 200-230V, 3Ph, 50/60Hz, 17.2A

Product Details

Used Neslab Thermoflex 15000

Inventory Number: 64937
Now (USD): $8,500.00

Neslab Thermoflex 15000 15000 Watt Refrigerated Recirculating Chiller. Air cooled compressor. Temperature range +5°C to 40°C. Cooling capacity at 20°C 15000 W / 51228 BTU. Reservoir volume 4.75 gallons. Centrifugal pump 10 gpm at 32 psi.  Easy-to-use, easy-to-maintain, high performance chiller configurable to the most demanding applications. 208/230V, 3Ph, 60Hz

Product Details

Used Neslab HX-300A

Inventory Number: 65023
Now (USD): $5,250.00

Neslab HX 300A Air Cooled Refrigerated Recirculating Chiller. Digital controller. Temperature Range: 5°C to 35°C. Cooling Capacity: 34,100 btu/hr at 20°C. TU-5 Pump: 9 gpm at 50 psi. 208-230V, 3 Ph, 60 Hz, 31.7A

Product Details

Used Nikon Eclipse L200D

Inventory Number: 64965
Now (USD): $21,000.00

Nikon Eclipse L200D Nomarski 8" Wafer Inspection Microscope with Camera and Measuring Software. Includes a Spot Insight 2 Megsample camera with capture and measuring software and pc. Microscope has top and bottom illumination, reflected and transmitted light. Trinocular compound microscope with optional camera adapter for dual viewing through 10X eyepieces and camera at the same time. Nomarsky prism/DIC analyzer & polarizer slider inserts. 6-place motorized objective turret with the following objectives: L PLAN 2.5X, LU PLAN FLUOR 5X, LU PLAN FLUOR 10X, LU PLAN FLUOR 20X, LU PLAN FLUOR 50X, LU PLAN FLUOR 100X. Brightfield/Darkfield illumination.C-mount camera port adapter. Coarse/fine focus controls on both sides.Focusing target to get you "close". 8x8 stage has 8"x8" travel. 100-120V 50/60Hz 2.4A

Product Details

Used OAI 806MBA-101462

Inventory Number: 64983
Now (USD): $39,000.00

OAI Model 806 MBA NUV 4" Mask Aligner is a four-camera, manual, optical backside mask aligner system that is designed to greatly surpass the performance of IR backside aligners. Provides full optical backside alignment and is ideal for use in R&D labs, universities, and low volume production. Built on an anti-vibration table, the fixed mask holder assembly virtually guarantees alignment accuracy and repeatability. Using the Model 806 MBA is a simple process, as all functions are controlled via the easy to read LCD screens. Currently configured with 4" wafer chuck. 500 watt NUV lamp housing with 365-440nm mirrors. Sub-micron level-to-level alignment. High efficiency, uniform exposure system Intensity controlled power supply. User definable operational parameters. Modular design. Motorized backside focus. Dual video cameras with LCD screens. Very versatile, front/backside optical alignment system. SYSTEM NO LONGER SUPPORTED BY OAI. We will fully test the system and make sure it is in good working condition at time of sale.

Product Details

Used OEM GROUP 470S

Inventory Number: 64950
Now (USD): $6,950.00

OEM Group 470S SRD High Performance Spin Rinse Dryer Wafer Cleaner. The SRD is a 25 wafer, batch size, single or dual chamber tool. This proven design has demonstrated uptime of 95%. Introduced in 1979, over 25,000 SRD units have shipped worldwide. Spray on axis orientation allows uniform spray onto the wafers. Clean / Rinse built-in resistivity monitoring assures an automatic and reliable clean; the process chamber is cleaned with the product; quick ramp S model brushless DC motor provides economy and efficiency. Dry centrifugal drying, coupled with heated nitrogen and a lowpressure nitrogen purge through a heated process chamber. Flexible Fast easy to change rotors for simple re-configuration to match any array of applications’ wafers. Currently configured with single bolt rotor for 6" x 6" squares. 120V, 50/60Hz, 15A

Product Details