Vacuum Parts & Controls

Balzers PKR 250 Compact Full Range Vacuum Gauge

Ebara 929570 Large vacuum Forline filter. KF50 flanges. Date of Mfg.: 11/2011. Element 929584.

NEW, NEVER USED

Granville Phillips 390 Series Micro ATM Module Gauge, 2.75 in. 2 Setpoints CF, Digital Display, Dual Yttria-coated Iridium ion gauge filaments,
Pressure Measurement of 1x10-9 Torr. For Vacuum Quality Monitor (VQM) 830 or 835. PN: 390802-2-YG-T. The Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

Granville Phillips 390 Series Micro ATM Module Gauge, 2.75 in. 2 Setpoints CF, Digital Display, Dual Yttria-coated Iridium ion gauge filaments, Pressure Measurement of 1x10-9 Torr. For Vacuum Quality Monitor (VQM) 830 or 835. PN: 390802-2-YG-T. The Granville-Phillips Micro-Ion ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precision indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

MKS Granville Phillips 835100-YG-1D Vacuum Quality Monitor Gauge. Gauge used for RGA System. The Granville-Phillips® 835100-YG-1D Gauge for the VQM Vacuum Quality Monitor System measures 1 to 145 amu, with a demountable envelope. NEW, NEVER USED. 2 AVAILABLE

Granville Phillips 332 Vacuum Gauge Controller. P/N 20332-449

5 Available

Inficon Cygnus Thin Film Crystal Deposition Controller. M/N 779-700-G1. Can control or monitor film thickness deposition rates. Unit is currently configured with 4 channels and 2 relay/input boards. Unit comes with what is in the photos, no additional cables or parts. 120V, 50/60Hz, 4A

Inficon 750-446-G1 CrystalSix Deposition Sensor. CrystalSix sensor offers the security of 6 quartz monitor crystals in one sensor head. When used with an INFICON Thin Film Controller the CrystalSix automatically rotates a new crystal into position whenever the current crystal fails or becomes unstable. Crystals are automatically replaced without interrupting your process for continued deposition rate monitoring.

Miscellaneous Vacuum Flange. 12-inch OD flange. Top plate for a CVD system. Multiple gas feedthroughs on top and a screen baffle on the bottom of the plate.

Miscellaneous Insulating Flange. Non-conducting ring in between flanges. 9.25 in. OD, 6 in. ID, 8.25 in. hole center with o-ring groove. Second flange does not have o-ring groove.