Vacuum Parts & Controls

Unit Instruments 3165 Mass Flow Controller. N2 100 SCCM. NEVER USED.  5 Available.

Unit Instruments 1665 Mass Flow Controller. NH3 2 SLM. NEVER USED.

Unit Instruments 1665 Mass Flow Controller. NH3 2 SLPM. Device net connector. CE.

Unit Instruments UCAL-1000 Mass Flow Transfer Calibrator. Used to test and calibrate mass flow controllers. Special adapters may be needed. Manual calibrator for ranges from 200 sccm to 30 slm. Requires transfer standard. 120V, 50/60 Hz.

Unit Instruments URS-10 MFC Power Supply and Readout. Designed to supply continuous power and selectable valve voltage to as many as ten unit mass flow meters, controllers or transfer standards. 120V, 60 Hz.

Unit Instruments DX-5. 5 Channel Mass Flow Control System. Capable of controlling up to five mass flow controllers or meters and one pressure controller. Setpoint and output are shown as a percentage of full scale on the blue/white touch screen display. User friendly menu screens enable configuration on each channel. 115V, 60 Hz. 9 Available.

Unit Instruments UCAL 1000. Mass Flow Transfer Calibrator. Used to test and calibrate mass flow controllers. Special adapters may be needed. Manual calibrator for ranges from 200 sccm to 30 slm. Requires transfer standard. 120V, 50/60 Hz.

Unit Instruments UFC 7321 MFC Mass Flow Controllers. Price is for one unit, total of six available.

100cc NH3, 100cc O2, 200cc N2O, 200cc 2/SiH4/Ar, 500cc CF4, 200cc N2

Vacuum Sample Transfer Arm. Magnetically coupled transfer arm for moving sample inside a vacuum chamber. 37" overall length. 6" od Conflat Flanges.