Sputtering Systems

Gencoa Planar Magnetron Cathode. Target Area: 29-1/2 in. x 4-7/8 in. Gas input. With cart for maintenance of cathode.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Gencoa Planar Magnetron Cathode. Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

Denton Vacuum Desk II Sputter Coater Cold sputter and etch system for coating SEM samples. Self-contained cool sputter coater. Automatic or manual operation. Magnetron sputter head. Pyrex Chamber: 6” dia. Sputtering and etch modes. 120V, 60 Hz. View video demonstration of tool functioning: 

https://youtu.be/eu_nnPBSAes

Anatech Hummer 8.1 HTD. STG. Two Gun DC Sputtering System. Self contained deposition tool with built in roughing and turbo pumps. Timer control, manual power level control. Substrate rotation control of the 8"diameter rotating table. Two 1 3/4" DC magnetron cathodes. Single gas input. 12" diameter quartz chamber. Does not come with a Crystal deposition controller or substrate heater. 120V, 60Hz, 20A