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PECVD - Oxidation

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Used Schumacher VMFC

Inventory Number: 62426
Now (USD): $2,500.00

Schumacher VMFC Vapor Mass Flow Controller. Part No.: 1483-2201B. System used on CVD system bubblers.

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Used Schumacher VMDTEOS 3-6

Inventory Number: 62468
Now (USD): $2,500.00

Schumacher VMDTEOS 3-6 Vapor Mass Flow Controller for TEOS Bubbler. Contains MFC, system microprocessor and control electronics. 90-250V, 50/60 Hz, 10/5A, CE.

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Used Schumacher VMFC

Inventory Number: 62469
Now (USD): $2,500.00

Schumacher VMFC Vapor Mass Flow Controller for TEOS Bubbler. Contains MFC, system microprocessor and control electronics. 90-250V, 50/60 Hz, 10/5A, CE.

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Used Schumacher ATS-15 TLC ABU/TLC

Inventory Number: 63808
Now (USD): $2,950.00

Schumacher ATS-15 TLC ABU/TLC Temperature Control System Dopant Bubbler. Trans-LC quartz system temperature range 10 to
22°C. Microprocessor based source temperature control system designed for CVD and diffusion source delivery. No quartz with system.

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