Used Thermo Oriel Accudose 9000

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Accudose 9000

Equipment Details

Inventory Number: 53217
Category: Exposure - Mask Aligners - UV Curing
Manufacturer: Thermo Oriel

Thermo Oriel Accudose 9000 Photospeed Tool. Measures batch to batch photospeed variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.

Now (USD): $12,500.00

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Product Details

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Specifications:

  • 70mW per sq. centimeter @ 365nM wavelength
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  • Power: 115 VAC; 3.5 amp; 50/60 Hz
  • Cover gas: N2 20 psi @ 0.5 CFM

Product Details