Used Semiconductor Equipment Corporation 365

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365

Equipment Details

Inventory Number: 64930
Category: Exposure - Mask Aligners - UV Curing
Manufacturer: Semiconductor Equipment Corporation

Semiconductor Equipment Corp 365 UV Tape Exposure System. Revolutionary new design cures UV tapes quickly and uniformly, features a long life light source and handles all size wafers up to 300mm. The Model 365 UV exposure system needs no external ventilation and has a small footprint.

Model 365 Capabilities:

  • Cures most UV tape in 5 seconds
  • Large exposure area cures up to 300mm wafers.
  • Film Frame masks available.
  • Programmable N2 purge and cure time
  • Touch screen control
  • Safety interlock to prevent operator exposure to UV light
  • Self diagnostic (alarm if LED fails, identifies faulty LED module)
  • 10,000 hour LED life
  • Generates no ozone
  • Cooling fans temperature controlled

 

Specifications:

  • 70mW per sq. centimeter @ 365nM wavelength
  • 21.5” wide X 31.5” long X 5.5” high
  • Weight: 55 pounds
  • Power: 115 VAC; 3.5 amp; 50/60 Hz
  • Cover gas: N2 20 psi @ 0.5 CFM
Now (USD): $7,500.00

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