Used CHA SE-600-RAP

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

Miscellaneous Deposition Source. Effusion Cell with Power Supply. Item has shutter and deposition source. Power supply with temperature controller. 4.5 in. OD conflat flange. 120V, 50/60 Hz, CE.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with shutter. 4.5 in. OD conflat flange.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with 4.5 in. OD conflat flange.

Miscellaneous Deposition Source. Effusion Deposition Source with Power Supply. Includes power supply with temperature controller. Deposition source with 4.5 in. OD conflat flange.

Kurt J Lesker LXLT-42010 Low Temperature Evaporation Source. LTE power supply and Thermal Evaporation Source. No cables.

8 AVAILABLE

Denton Infinity 18 Optical Coating Evaporator for Antireflective Coatings. Cryopumped high vacuum system that performs resistive evaporation of silicon monoxide (SiO, Silicon (II) Oxide) films to provide an antireflective coating for backside analysis. The system has an integrated optical monitor to measure the surface reflectance of a silicon witness coupon at a specific wavelength. Pumpdown of the vacuum system can be automatic or manual control, inniation and termination of the deposition cycle are manual. The vacuum, coating power, and optical monitor systems are operated from the touch screen controller panel. The deposition itself is operated from the Telemark 860 Depostion Controller panel. Chamber size 18" x 23" x 36" inside. Includes roughing pump and cryopump compressor. 208V, 3Ph, 50/60Hz, 70A

Para Tech LabTop 3000 Compact Bench Top Parylene Conformal Coating System. The compact LabTop by Para Tech is designed for coating small substrates and modules in laboratory, R&D and short run production settings. Its 8” by 9” stainless steel chamber can also accommodate larger devices for prototyping and research and development applications. Features the same automated process features and vacuum coating precision as full size Para Tech coating systems. Ideal for application development as well as short run production coating of printed circuit boards, medical components, electronic sensors and other small substrates. Tangential entry and exit of the polymerizing monomer results in an extremely low coating thickness gradient as well as superior film uniformity. Produces very thin Parylene film for optical applications and microwave components.  CE compliant.

Specialty Coating Systems PDS 2010 Parylene Coating System. pecialty Coating Systems portable parylene deposition system. Automatic operation, PLC control in auto mode the system pumps down to a preset pressure and the furnace cycles up to operating temperature. When proper temperature and pressure are established the vaporizer begins parylene sublimation. 12” dia. x 12” H stainless steel chamber. Substrate rotation plate. Liquid nitrogen trap with auto fill option. 120V, 60 Hz, 20A, CE.

Specialty Coating Systems PDS 2010 Parylene Coating System. Specialty Coating Systems portable parylene deposition system. Automatic operation, PLC control in auto mode the system pumps down to a preset pressure and the furnace cycles up to operating temperature. When proper temperature and pressure are established the vaporizer begins parylene sublimation. 12” dia. x 12” H stainless steel chamber. Substrate rotation plate. Liquid nitrogen trap. 120V, 60 Hz, 20A, CE