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Equipment Details

Inventory Number: 64582
Category: Cleaning Systems
Manufacturer: STI

Semitool STI 870 Spin Rinser Dryer Double Stack. 6” Wafer Rotor in the top spinner and a 4" Rotor in the bottom spinner. High performance cleaning, rinsing and drying system for 25 wafer batch cassette. This system is capable of cleaning substrates from 2” to 6” round if the correct Rotor is installed for that wafer size. On axis orientation keeps wafers parallel allowing DI water manifolds to spray both sides of product continuously and simultaneously. Built in resistivity monitor. 120V, 50/60 Hz,

Now (USD): $8,500.00

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Features

  • Freeboard ratio of greater than 124% to eliminate diffusion losses
  • Refrigerated primary condensing coil to condense the bulk of the solvent vapors
  • Refrigerated sub-zero freeboard condenser to provide a cold air barrier minimizing fugitive losses
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  • Bag filter to minimize solvent loss during maintenance
  • Cooled internal water separator to reduce losses
  • Stainless plumbing for solvent-wetted areas
  • Includes optional Automated hoist system with automated lid.
  • 40 Khz Ultrasonics

Specifications

 Solvent capacity 26 gallons
Working dimensions 12" x 16" x 12"D
Watts of Immersion Heat 4000 watts
Distillation rate 14 gph
Load capacity 400lbs.steel/hr
Vapor zone 32.7"L X 19.2"W X 12"D
Input power 230V 3 phase 40A

Product Details