Vacuum Valves - Chambers - Systems

11 in. OD, 8 in. ID. 100-115V, 50/60 Hz. Valve only, no controller.

Pneumatic actuation. 11 in. OD, 8 in. ID. ASA flange. Stainless steel.

Conflat Flange Right Elbow. 10-inch OD conflat flange 90 degree elbow.

UHV Chamber. All flanges are UHV conflat type. Bottom flange 8 in. OD. Top flange has product manipulator mounted. Top of chamber has one 8 in. OD viewport, five 4-1/2 in. OD viewports, one 8 in. OD blank off, one 4-1/2 in. OD blank and one 2-3/4 in. OD electrical feedthrough. Side of chamber has six 4-1/2 in. OD ports and one 6 in. OD port. Chamber is approximately 32 in. dia.

UHV Process Chamber. Top Port: 8 in. OD conflat with 4-1/2 in. OD viewport and 1-3/8 in. OD blankoff port and 3 in. OD electrical feedthrough. Bottom Port: 6 in. OD conflat UHV flange. 6 in. OD side flange with water feedthroughs and two voltage feedthroughs. 2-3/4 in. OD side viewport. 4-1/2 in. OD side conflat flange. 2-3/4 in. OD side voltage feedthrough.

High Vacuum Chamber with Substrate Translation Controller. 15-3/4 in. x 15 in. H stainless vacuum chamber. 18 in. OD top plate conflat flange with four conflat flanges: 6 in. OD, 2-3/4 in. OD, 2-3/4 in. OD, 4-1/2 in. OD.Main chamber has many conflat flanges: nine 4-1/2 in. OD flanges, 10 in. OD flange, 8 in. OD flange with high voltage feedthroughs, 8 in. OD flange with manual substrate manipulator with micrometer style controls, TC and voltage feedthroughs. three 2-3/4 in. OD flanges and one 1-1/4 in. OD flange with a pneumatic shutter installed. Bottom plate has six 4-1/2 in. OD flanges and two 2-3/4 in. OD flanges.

High Vacuum Chamber: 8¾” dia. 10” OD top conflat flange with two 2¾” OD viewports and two high voltage feedthroughs. Side of chamber has 2¾” OD viewport, 4½” OD viewport, 4½” conflat opening, two 1¼” OD conflats. Bottom has rotation mechanism.

Precision Vacuum Exhaust Control System. Used to control pumping speed. Butterfly flapper can be opened or closed in response to a signal from pressure transducer on the chamber. No transducer included. 3-inch ID. 115V/230V.

Exhaust Throttle Valve. Non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. Inner Diameter: 75mm/3 in.

Air Operated Valve. 3-3/4 in. OD ISO flange.