Vacuum Valves - Chambers - Systems

Stainless Steel In-Line Sputtering Chamber with Single Magnetron Cathode. Single chamber from a larger In-Line sputtering system. Chamber Length: 72 in. Opening Size: 34 in. L x 8-3/4 in. H. Single cathode mounted in sputter down configuration. Planar magnetron with target size 29-1/2 in. x 4-7/8 in. 14-1/2 in. OD ISO flange under chamber. Opening in top plate for a second cathode. System will not be tested.

Stainless Steel In-Line Vacuum Chamber. This is a single chamber from a larger In-Line sputtering system. Chamber Length: 72 in. Opening Size: 34 in. L x 8-3/4 in. H. 14-1/2 in. OD ISO flange on chamber bottom. Vacuum chamber not tested.

11 in. OD, 8 in. ID. 100-115V, 50/60 Hz. Valve only, no controller.

Pneumatic actuation. 11 in. OD, 8 in. ID. ASA flange. Stainless steel.

Spherical High Vacuum Chamber with Diffusion Pump. 11-inch dia. spherical chamber. Varian VHS-6 diffusion pump with M6 cold trap. Manual gate valve and roughing valves. Chamber is dirty inside. Not tested, Sold As Is.

Air Operated Valve. 3-3/4 in. OD ISO flange.  3 Available.

Precision Vacuum Exhaust Control System. Used to control pumping speed. Butterfly flapper can be opened or closed in response to a signal from pressure transducer on the chamber. No transducer included. 3-inch ID. 115V/230V.

Exhaust Throttle Valve. Non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. Inner Diameter: 75mm/3 in.  3 Available.

Ion Tube Isolation Valve. KF-25 flange.

Valve. Air operated. KF-50.