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Vacuum Valves - Chambers - Systems

Used Miscellaneous Elbow 10-inch

Inventory Number: 63092
Now (USD): $300.00

Miscellaneous Conflat Flange Right Elbow. 10-inch OD conflat flange 90 degree elbow.

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Used Miscellaneous Vacuum Chamber

Inventory Number: 63096
Now (USD): $9,500.00

Miscellaneous UHV Chamber. All flanges are UHV conflat type. Bottom flange 8 in. OD. Top flange has product manipulator mounted. Top of chamber has one 8 in. OD viewport, five 4-1/2 in. OD viewports, one 8 in. OD blank off, one 4-1/2 in. OD blank and one 2-3/4 in. OD electrical feedthrough. Side of chamber has six 4-1/2 in. OD ports and one 6 in. OD port. Chamber is approximately 32 in. dia.

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Used Miscellaneous Vacuum Chamber

Inventory Number: 63106
Now (USD): $3,500.00

Miscellaneous UHV Process Chamber. Top Port: 8 in. OD conflat with 4-1/2 in. OD viewport and 1-3/8 in. OD blankoff port and 3 in. OD electrical feedthrough. Bottom Port: 6 in. OD conflat UHV flange. 6 in. OD side flange with water feedthroughs and two voltage feedthroughs. 2-3/4 in. OD side viewport. 4-1/2 in. OD side conflat flange. 2-3/4 in. OD side voltage feedthrough.

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Used Miscellaneous Vacuum Chamber

Inventory Number: 63133
Now (USD): $9,500.00

Miscellaneous High Vacuum Chamber with Substrate Translation Controller. 15-3/4 in. x 15 in. H stainless vacuum chamber. 18 in. OD top plate conflat flange with four conflat flanges: 6 in. OD, 2-3/4 in. OD, 2-3/4 in. OD, 4-1/2 in. OD.Main chamber has many conflat flanges: nine 4-1/2 in. OD flanges, 10 in. OD flange, 8 in. OD flange with high voltage feedthroughs, 8 in. OD flange with manual substrate manipulator with micrometer style controls, TC and voltage feedthroughs. three 2-3/4 in. OD flanges and one 1-1/4 in. OD flange with a pneumatic shutter installed. Bottom plate has six 4-1/2 in. OD flanges and two 2-3/4 in. OD flanges.

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Used Miscellaneous Vacuum Chamber

Inventory Number: 63192
Now (USD): $950.00

Miscellaneous High Vacuum Chamber. 8¾” dia. 10” OD top conflat flange with two 2¾” OD viewports and two high voltage feedthroughs. Side of chamber has 2¾” OD viewport, 4½” OD viewport, 4½” conflat opening, two 1¼” OD conflats. Bottom has rotation mechanism.

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Used MKS 253A-3-2-2/152

Inventory Number: 61846
Now (USD): $950.00

MKS 253A-3-2-2/152 Precision Vacuum Exhaust Control System. Used to control pumping speed. Butterfly flapper can be opened or closed in response to a signal from pressure transducer on the chamber. No transducer included. 3-inch ID. 115V/230V.

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Used MKS 253A-3-2-2

Inventory Number: 62011
Now (USD): $250.00

MKS 253A-3-2-2 Exhaust Throttle Valve. Non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. Inner Diameter: 75mm/3 in.

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Used MKS 653B-3-80-2

Inventory Number: 63037
Now (USD): $750.00

MKS 653B-3-80-2 Throttle Valve. 6 in. OD, 3 in. ID. CE marked.

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Used MKS/HPS Valves

Inventory Number: 63546
Now (USD): $300.00

MKS/HPS Vacuum Valves. Lot of 3.

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Used Norcal 3870-01160

Inventory Number: 49510
Now (USD): $100.00

Norcal 3870-01160 Ion Tube Isolation Valve. KF-25 flange.

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