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Wafer Analysis

Used August Technology NSX-85

Inventory Number: 57564
Now (USD): $45,000.00

Automated Defect Inspection System. Inspection of whole wafers, sawn wafers, JEDEC trays, Auer boats, die in gel/waffle paks, MCM’s. Detects defects down to 0.5 micron. Automated wafer mapping and identification. Automated data collection and reporting. Menu-based, easy to use Windows environment. 200-240V, 1 Ph, 50/60 Hz, 5A, CE.

Product Details

Used Bruker Dektak XT

Inventory Number: 63051
Now (USD): $29,000.00

Precision Stylus Profiler. Bruker’s DektakXT™ Stylus Profiler features a revolutionary design that enables 4 angstrom repeatability. Unmatched performance. 4 angstrom repeatability delivers industry leading accuracy. Single-arch design provides breakthrough scan stability. Leading-edge smart electronics establish new low noise benchmark. New hardware configuration offers 40 percent faster data collection times than prior generations. Unprecedented efficiency and ease of use. Intuitive Vision64™ user interface workflow simplifies operation. Self-aligning styli enables effortless tip exchange. Single sensor design offers low force and extended range in a single platform. System has these options currently installed: Automation, DTX Stitching, DTX 3D Mapping and DTX N Light.

Measurement Technique: Stylus profilometry (contact measurement).
Measurement Capability: Two-dimensional surface profile measurements.
Sample Viewing: Digital magnification, 0.275 to 2.2 mm vertical FOV.
Stylus Force: 1 to 15 mg with LIS 3 sensor.
Low Force Option: N-Lite+ Low Force with 0.03 to 15 mg (optional).
Sample X/Y Stage: Motorized 150 mm (6 in.) X/Y, manual leveling.
Scan Length Range: 55 mm (2 in.).
Max. Sample Thickness: 50 mm (1.95 in.).
Step Height Repeatability: 4 angstrom, 1 sigma on steps less than or equal to 1 micrometer (30 scans using a 12.5 micrometers stylus).
Vertical Range: 1 mm (0.039 in.).
Vertical Resolution: 1 angstrom (at 6.55 micrometers range).
100-240V, 50/60 Hz, CE.
Date of Mfg.: 7/2011. Very nice condition.

Product Details

Used CDE Resmap 178

Inventory Number: 55143
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR CDE SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Four Point Probe Resistivity Measurement System. Four point probe system for mapping resistivity on substrates from 2 in. to 8 in. dia. Manual loading of subtrates. Measurement Range: 2 milliohms/sq. to 5 megaohms/sq. Polar maps, rectangular maps, line scan or user defined patterns. 115/230V, 60 Hz.

Product Details

Used CDE Resmap 273

Inventory Number: 62246
Now (USD): $35,000.00

Large Substrate Resistivity Mapping System. Designed to meet the needs of 300 mm process development and large substrate film characterization. Can handle wafers from 2 in. to 12 in. dia. and square substrates up to 8.6 in. x 8.6 in. Polar maps, rectangular maps, line scan or user defined scans. 120V, 60 Hz, CE.

Product Details

Used Cyberoptics Cyberscan 200

Inventory Number: 50584
Now (USD): $4,950.00

Non-Contact Profile Measurement System. Uses laser triangulation to analyze two dimensional data. Non-contact measurement allows you to work with wet and fragile samples. PC controller analyzes data. Motorized stage. 120V, 60 Hz.

Product Details

Used Daini Seikosha SFT/156

Inventory Number: 34297
Now (USD): $250.00

Fluorescent X-Ray Measurement System. X-Y Stage: 3 in. x 3 in. Travel Z. Adjustment: 1.3 in. Min. Measurement area: .005 in. Sold AS IS.

Product Details

Used Gaertner L2W16D.830

Inventory Number: 58267
Now (USD): $950.00

Multiwavelength 200mm Ellipsometer. Has a software disk but no cables or controls. Missing computer and stage driver. Two wavelength ellipsometers use additional laser sources to analyze difficult films. 8 in. dia. stage with motorized stage, no controller. Sold As Is with 30 day ROR.

Product Details

Used Gaertner L-26

Inventory Number: 58135
Now (USD): $950.00

Simple Manual Ellipsometer. Manual stage. Missing computer. Reliable HeNe laser source. Small 15 micron measuring spot. 115V, 50/60 Hz.

Product Details

Used JMAR S2610-01

Inventory Number: 50626
Now (USD): $6,000.00

Non-Contact Automatic 3-Axis Tabletop Measurement System. JMAR Video CMM® software. Supports high magnification microscope optics. Three channel computer controlled light source. X-Y stage travel: 10 in. x 4 in. 115V, 60 Hz. Mfg. 2001.

Product Details

Used KLA Tencor P-6

Inventory Number: 62308
Now (USD): $12,000.00

SOLD AS IS. UNIT DOES NOT HAVE A PC. PARTS NOT WORKING.

Surface Profiler. Unit does not have a PC. The P-6 surface profiler features an unprecedented range of features and capabilities in a mid-range general purpose instrument. A variety of options are available to enhance the capabilities of the standard system. Stylus Profiling: The precision scan stage design enables high quality scans over the entire 6 in. sample stage area with up to 150 mm scan length and 1 mm Z range. This design ensures the highest quality 2D scans resulting in a higher level of metrology quality. Step Height Repeatability: A step height repeatability of 6 angstrom or 0.1 percent (1s ), a noise floor below 1nm RMS as measured on the scan stage, and a sub-Angstrom resolution capacitance sensor translates into the most repeatable, and sensitive ultra-thin film step measurements,roughness/waviness measurements and accurate curvature reproduction. Parts not working.

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