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Wafer Analysis

Used August Technology NSX-85

Inventory Number: 57564
Now (USD): $10,000.00

Automated Defect Inspection System. Inspection of whole wafers, sawn wafers, JEDEC trays, Auer boats, die in gel/waffle paks, MCM’s. Detects defects down to 0.5 micron. Automated wafer mapping and identification. Automated data collection and reporting. Menu-based, easy to use Windows environment. 200-240V, 1 Ph, 50/60 Hz, 5A, CE. Sold As Is.

Product Details

Used Bruker Dektak XT

Inventory Number: 63051
Now (USD): $29,000.00

Precision Stylus Profiler. Bruker’s DektakXT™ Stylus Profiler features a revolutionary design that enables 4 angstrom repeatability. Unmatched performance. 4 angstrom repeatability delivers industry leading accuracy. Single-arch design provides breakthrough scan stability. Leading-edge smart electronics establish new low noise benchmark. New hardware configuration offers 40 percent faster data collection times than prior generations. Unprecedented efficiency and ease of use. Intuitive Vision64™ user interface workflow simplifies operation. Self-aligning styli enables effortless tip exchange. Single sensor design offers low force and extended range in a single platform. System has these options currently installed: Automation, DTX Stitching, DTX 3D Mapping and DTX N Light.

Measurement Technique: Stylus profilometry (contact measurement).
Measurement Capability: Two-dimensional surface profile measurements.
Sample Viewing: Digital magnification, 0.275 to 2.2 mm vertical FOV.
Stylus Force: 1 to 15 mg with LIS 3 sensor.
Low Force Option: N-Lite+ Low Force with 0.03 to 15 mg (optional).
Sample X/Y Stage: Motorized 150 mm (6 in.) X/Y, manual leveling.
Scan Length Range: 55 mm (2 in.).
Max. Sample Thickness: 50 mm (1.95 in.).
Step Height Repeatability: 4 angstrom, 1 sigma on steps less than or equal to 1 micrometer (30 scans using a 12.5 micrometers stylus).
Vertical Range: 1 mm (0.039 in.).
Vertical Resolution: 1 angstrom (at 6.55 micrometers range).
100-240V, 50/60 Hz, CE.
Date of Mfg.: 7/2011. Very nice condition.

Product Details

Used Cyberoptics Cyberscan 200

Inventory Number: 50584
Now (USD): $4,950.00

Non-Contact Profile Measurement System. Uses laser triangulation to analyze two dimensional data. Non-contact measurement allows you to work with wet and fragile samples. PC controller analyzes data. Motorized stage. 120V, 60 Hz.

Product Details

Used Gaertner L2W16D.830

Inventory Number: 58267
Now (USD): $950.00

Multiwavelength 200mm Ellipsometer. Has a software disk but no cables or controls. Missing computer and stage driver. Two wavelength ellipsometers use additional laser sources to analyze difficult films. 8 in. dia. stage with motorized stage, no controller. Sold As Is with 30 day ROR.

Product Details

Used Gaertner L-26

Inventory Number: 58135
Now (USD): $950.00

Simple Manual Ellipsometer. Manual stage. Missing computer. Reliable HeNe laser source. Small 15 micron measuring spot. 115V, 50/60 Hz.

Product Details

Used JMAR S2610-01

Inventory Number: 50626
Now (USD): $6,000.00

Non-Contact Automatic 3-Axis Tabletop Measurement System. JMAR Video CMM® software. Supports high magnification microscope optics. Three channel computer controlled light source. X-Y stage travel: 10 in. x 4 in. 115V, 60 Hz. Mfg. 2001.

Product Details

Used KLA Tencor P-6

Inventory Number: 62308
Now (USD): $12,000.00


Surface Profiler. Unit does not have a PC. The P-6 surface profiler features an unprecedented range of features and capabilities in a mid-range general purpose instrument. A variety of options are available to enhance the capabilities of the standard system. Stylus Profiling: The precision scan stage design enables high quality scans over the entire 6 in. sample stage area with up to 150 mm scan length and 1 mm Z range. This design ensures the highest quality 2D scans resulting in a higher level of metrology quality. Step Height Repeatability: A step height repeatability of 6 angstrom or 0.1 percent (1s ), a noise floor below 1nm RMS as measured on the scan stage, and a sub-Angstrom resolution capacitance sensor translates into the most repeatable, and sensitive ultra-thin film step measurements,roughness/waviness measurements and accurate curvature reproduction. Parts not working.

Product Details

Used Kruss FM40 EasyDrop

Inventory Number: 62365
Now (USD): $8,500.00

Contact Angle Measuring System. Computer controlled dosing. Regulable illumination. Digital image allows perfect drop shape analysis. Accuracy: +/- 0.1 degrees. 100-240V, 47-63 Hz, CE.

Product Details

Used Nanometrics 8300X

Inventory Number: 59620
Now (USD): $19,000.00

Thin Film Metrology Tool. Unit gives robot error when powered up. Can accommodate 300mm wafers. Film thickness measurement system. Sold As Is.

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Used Nanometrics Nanospec 6100

Inventory Number: 62025
Now (USD): $39,000.00

Automated Film Thickness Measurement System. Tabletop film thickness measurement and mapping tool. Designed to measure the thickness of films deposited on various substrates including those used in semiconductor and magnetic head fabrication. Uses non-contact spectroreflectometry on sites as small as 10 micrometers. A computer sample stage and a robust autofocus system allows the automatic generation of film thickness uniformity maps. 115V, 50/60 Hz, 5A.

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