Ulvac

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 34"H. There are currently THREE deposition soucres wired inside the chamber. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Chamber sold as is not tested. THE LARGE SOURCE IN THE PHOTOS HAS BEEN REMOVED AND IS NOT AVAILABLE!

Ulvac High Vacuum Elevator Chamber. Stainless steel Vacuum chamber with port on top for high vacuum pump- previously had a CTI 8F which was sold separately. Has a slot valve that was used to pass substrates in and out of the chamber. Sold as is not tested. In very good condition. Inside dimensions 19.5"W x 18.5"D x 48"H