Logitech

Logitech DH-300 Driven Head Precision Polishing System. Developed to address the issue of polishing times when processing semiconductor materials often describe as “hard” to polish within the industry. These systems have been designed for semi-automated final stage polishing of hard materials such as sapphire, silicon carbide (SiC)or gallium nitride (GaN). Features special polishing carrier head that applies high levels of down-force onto the samples, whilst rotational speed and direction are fully controllable. This results in the highest level of sample throughput of any of the Logitech systems.

• Manual Mode’ allows operators to control individual process parameters and variables such as rotational speed and direction of carrier heads via the Graphical User Interface (GUI).
• ‘Automatic Mode’ allows users to save and re-call multi-stage process recipes – making each process completely repeatable, even across different operators.