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Headway Research

Used Headway Research CB-15

Inventory Number: 55891
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR HEADWAY RESEARCH SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Photoresist Spinner. Capable of spinning up to 9 in. dia. substrates. EC101-D controller. 15 in. dia. bowl. RPM Range: 50 to 10,000. Acceleration: 0.25 sec. to 1.25 sec. 115V, 50/60 Hz, 3A.

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Used Headway Research PWM32-PS-R790

Inventory Number: 60114
Now (USD): $3,950.00

Photoresist Spinner with Digital Programmable Controller. Mounted in a Headway cabinet. Up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks. Maximum substrate size up to 5-inch. Does not have dispense pumps or lines. Will need vacuum source for wafer hold-down. 120V, 60 Hz.

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Used Headway Research PWM32-R790

Inventory Number: 61325
Now (USD): $5,250.00

Photoresist Spinner Mounted in Exhaust Hood Table. Spin coater for substrates up to 5 in. diameter or diagonal. The bowl diameter is 7.9 in. ID. Up to 10,000 rpm for relatively light loads such as silicon wafers or small photomasks. Two HDP98 pump fluid dispensers included at no additional price but these are not tested or part of warranty. PWM32 digital controller. Unit is mounted on a table with a stainless fume hood. 120V, 50/60 Hz, 10A.

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Used Headway Research 1-PM101D-R485

Inventory Number: 62322
Now (USD): $2,500.00

Photo Resist Spinner with Motor Control Unit. Extremely versatile and reliable line of equipment for coating silicon and germanium wafers and large glass and ceramic substrates with photo sensitive material. Great flexibility for labor production line. Close loop servo control amplifier and electro-dynamic brake. Digital tachometer and automatic cycle timer. Adjustable acceleration from 50 to 5,000 rpm/sec. 8-inch dia. bowl. Vacuum chuck.

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