Denton Vacuum

Denton Infinity 18 Optical Coating Evaporator for Antireflective Coatings. Cryopumped high vacuum system that performs resistive evaporation of silicon monoxide (SiO, Silicon (II) Oxide) films to provide an antireflective coating for backside analysis. The system has an integrated optical monitor to measure the surface reflectance of a silicon witness coupon at a specific wavelength. Pumpdown of the vacuum system can be automatic or manual control, inniation and termination of the deposition cycle are manual. The vacuum, coating power, and optical monitor systems are operated from the touch screen controller panel. The deposition itself is operated from the Telemark 860 Depostion Controller panel. Chamber size 18" x 23" x 36" inside. Includes roughing pump and cryopump compressor. 208V, 3Ph, 50/60Hz, 70A