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Power Supplies - RF-Plasma-E-Gun

Used ENI OEM-12J

Inventory Number: 57465
Now (USD): $1,950.00

1250W 13.56 MHz RF Generator. Water cooled. Output Frequency: 13.56 MHz. Max. Output Power: 1250W. RF Output Impedance: 50 ohms.

Product Details

Used ENI OEM-50N-11601

Inventory Number: 60286
Now (USD): $2,950.00

13.56 MHz 5000W RF Plasma Generator. Previously used for Novellus system. Solid state rugged RF generator. Automatic forward power leveling. Pulsed operation. Output Frequency: 13.56 MHz with a maximum 5000W. Water cooled. 208V, 3 Ph, 50/60 Hz, 40A.

Product Details

Used ENI OEM-50NM1

Inventory Number: 60288
Now (USD): $2,950.00

13.56 MHz 5000W RF Plasma Generator. Previously used for Novellus system. Solid state rugged RF generator. Automatic forward power leveling. Pulsed operation. Output Frequency: 13.56 MHz with a maximum 5000W. Water cooled. 208V, 3 Ph, 50/60 Hz, 40A.

Product Details

Used ENI OEM-50N-11601

Inventory Number: 60598
Now (USD): $2,950.00

RF Solid State Power Generator. 13.56 MHz frequency. Pulsed operation. 5000W maximum output. 0-6000W power meter scale. Type “LC” RF power connector. Water cooled. Specifically designed for OEM use.

Product Details

Used ENI OEM-50N-11601

Inventory Number: 60597
Now (USD): $2,950.00

RF Solid State Power Generator. Frequency: 13.56 MHz. Max. Output: 5000W. Power Meter Scale: 0-6000W. Type “LC” RF power connector. Water cooled. Specifically designed for OEM use. Pulsed operation.

Product Details

Used ENI HF-300T

Inventory Number: 61260
Now (USD): $1,500.00

300 Watt 13.56 MHz RF Generator. Max. Output Power: 300W. Frequency: 13.56 MHz. Forced air cooling.

Product Details

Used ENI HF-300T

Inventory Number: 61259
Now (USD): $1,500.00

300 Watt 13.56 MHz RF Generator. Max. Output Power: 300W. Frequency: 13.56 MHz. Forced air cooling.

Product Details

Used EPI H818-D4

Inventory Number: 53769
Now (USD): $450.00

Effusion Cell Controller. Controller only, no cables or other parts. 110V, 60 Hz, 25A. Can only do power on test.  2 Available.

Product Details

Used Huttinger TIG 20/300

Inventory Number: 47425
Now (USD): $4,500.00

RF Induction Generator. Output power: 20,000W. Output frequency: 30 to 300 kHz. Output voltage: 440V. 460V, 3 Ph, 60 Hz.

Product Details

Used Huttinger PFM 1000A

Inventory Number: 51736
Now (USD): $1,500.00

13.56 MHz 1000W Matching Network. Matching network only, no controller.

Product Details