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Sputtering Systems

Used Anatech Hummer X

Inventory Number: 57121
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR ANATECH SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Cold Deposition/Etch Sputter Coater for SEM Sample Preparation. Does not have thickness monitoring crystal. Magnetically enhanced sputter head minimizes sample heating. Etch and plasma mode for removal of organic surface contamination. Automatic slow venting at termination of process. Built-in pump. Sample stage accommodates up to 3 in. dia. substrate or 12 SEM stubs. Does not come with gold target. 115V, 60 Hz, 4A.

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Used CPA V2000

Inventory Number: 57052
Now (USD): $119,000.00

Five Target RF and DC Magnetron In Line Sputtering System. Currently configured for single sided sputtering but cathodes can be moved manually if double sided sputtering is desired. Target Size: 3-1/2 in. x 18 in. Easy access to cathodes via hinged doors. Currently configured with 4 DC and 1 RF cathodes. Multiple CTI cryopumps for high vacuum. Load lock chambers on both ends. Loader handles up to 28 20 in. H panels or pallets. Variable speed pallet transport system. Tested: $119,000. As Is Untested: $69,000.

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Used Denton Vacuum Desk II

Inventory Number: 56176
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR DENTON VACUUM SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Cold Sputter and Etch System for Coating SEM Samples. Self contained cool sputter coater. Automatic or manual operation. Magnetron sputterhead. 6 in. dia. pyrex chamber. Sputtering and etch modes. Uses foil targets that can be changed in minutes (no target with unit). 120V, 60 Hz.

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Used Denton Vacuum Explorer 14

Inventory Number: 61455
Now (USD): $21,500.00

DC Sputtering System. Chamber: 12 in. dia. x 18 in. H glass Pyrex bell jar with guard. 15-inch dia. baseplate/pumping plenum assembly supported by system cabinet. System mounted on casters. Pumping System: Turbomolecular pump, LN2 trap located beneath high vacuum poppet valve and manual fill via external funnel. Alcatel 2010 two stage, rotary vane pump. Sputter Source: (1) DSM-300A cold sputter module. 300W DC power supply, 4-inch dia. magnetron sputter source with Denton Vacuum patented ANODE GRID® for maximum electron capture and minimal specimen heating. Variable source to substrate distance. Substrate Fixturing: 8.0 in. Omni rotating fixture plate, speed adjusts via input to system touch screen. Air operated shutter. Control System: The Explorer 14 system is semiautomatic and is controlled by a DL205 CPU from Automationdirect. The operator interface is a touch panel with graphical interface to the PLC. Graphical interface is supported with Automationdirect software. Manual operation of valves, pumps, low voltage sources and fixture rotation subsystems is through this graphical interface. Semiautomatic processes are also operated through this interface.

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Used Denton Vacuum Explorer 14

Inventory Number: 62002
Now (USD): Contact for Price

Four Target RF DC Sputtering System with Loadlock. Thin film magnetron sputtering deposition system. Call for price and details.

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Used Denton Vacuum Desk IV Standard

Inventory Number: 62021
Now (USD): $5,500.00

Sputter Coater for SEM Samples. Provides a uniform, conductive, fine grained coating. Self-contained unit with built-in pump. Advanced design magnetron sputterhead for truly cold sputtering. Etch mode for sample cleaning. 6 in. OD pyrex chamber. Sputters precious metals, no target included. Does not require gas. 120V, 50/60 Hz, 10A.

Product Details

Used Edwards Auto 500

Inventory Number: 61707
Now (USD): $25,000.00

Deposition System with Low Temp Organic Source and Resistive Evaporation. Front loading thin film deposition system for research and development or pre-production. System has a total of three evaporation sources, two standard resistive sources and one Kurt J. Lesker low temperature source for organics. Dual crystal deposition film thickness monitor. Substrate rotation controller. Single shudder. Controller for substrate heat but does not have heaters. Dry scroll pump in base for chamber roughing. CTI cryopump with compressor for high vacuum pump down. CE marking. System can deposit one source at a time or can do codeposition.

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Used Gencoa Planar Magnetron Cathode

Inventory Number: 56694
Now (USD): $7,500.00

Target Area: 29-1/2 in. x 4-7/8 in. Gas input. With cart for maintenance of cathode.

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Used Gencoa Planar Magnetron Cathode

Inventory Number: 56692
Now (USD): $7,500.00

Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

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Used International Scientific Instruments PS-2

Inventory Number: 61528
Now (USD): $1,950.00

Sputter Coater. Simple manual sputter coater for SEM samples. Includes external vacuum pump. No gold target with system.

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