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Power Supplies - RF-Plasma-E-Gun

Used Comdel CPS 1000/4

Inventory Number: 34462
Now (USD): $2,950.00

RF Generator. 4.000 MHz output. Output power up to 1000W. With Match Pro controller. No Matching Network, only control box. Water cooled. 208V, 3 Ph, 50/60 Hz.

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Used Comdel CLF-5000/400

Inventory Number: 60278
Now (USD): $5,500.00

5000W 400 kHz Low Frequency Power Supply. P/N FP154ORG. Designed to meet the performance demand in RF driven plasma systems. 400 kHz, 5000W. Output power leveled on delivered power. Fast auto-tune circuitry. Water cooled. Removed from Novellus tool. 208V, 3 Ph, 50/60 Hz, 25A.

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Used Commonwealth Scientific N2000 PBES

Inventory Number: 53637
Now (USD): $1,250.00

Neutralizer Power Supply. 208/220V, 1 Ph, 50/60 Hz, 12A, CE.

Product Details

Used Diversified Technologies HPM 2.5-150110397

Inventory Number: 52767
Now (USD): $1,950.00

High Power Modulator.

Product Details

Used Dynatronix PMC103-1-3

Inventory Number: 57584
Now (USD): $3,500.00

Programmable Multi-Channel Power Supply Designed for Electroplating Wafers. Output Rating: Forward channel 3A and 10V peak at 33 percent duty cycle into 3.3 ohm. Non-inductive load fed thru 10 feet of 18 awg wire. Output Resolution: Step size at peak current 1mA. Step size at peak voltage 2.5mA. Measurement Resolution: Step size at average current 1mA. Step size at average voltage 2.5mA. Needs Windows PC to control unit.

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Used Dynavac 8542

Inventory Number: 51230
Now (USD): $350.00

Ion Source Controller. Sold As Is.

Product Details

Used Ehrhorn Technological Operations 80-S04

Inventory Number: 57964
Now (USD): $4,500.00

Two RF Generators for Applied Materials Cluster Tool. Previously used on Applied Materials HDP high density plasma chambers. Cannot test without controller. Sold AS IS with 30 day right to return.

Product Details

Used Electronic Measurements TCR20S90-1-D-0487-OV

Inventory Number: 46991
Now (USD): $450.00

20V, 90A DC Power Supply. 120V, 50/60 Hz.  2 Available.

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Used ENI RFC-4T

Inventory Number: 34998
Now (USD): $1,250.00

Controller. Links Plasma Generators & Matching Networks to Computers for digital metering and control.

Product Details

Used ENI RFC-2000

Inventory Number: 34906
Now (USD): $1,250.00

Controller. Links Plasma Generators & Matching Networks to Computers for digital metering and control.

Product Details