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Photoresist: Coaters - Tracks

Used SVG 90S

Inventory Number: 60611
Now (USD): $90,000.00

Vapor Prime/Coat Track System.  SVG Model 90S Clean Track System. 2 Coat, 2 Vapor Prime and 2 Develop modules and associated hot and cold bake plates, Cybor photoresist pumps. Chemical cabinet (D250085) with 6 chemicals - 3 photoresists, 1 developer, 1 HMDS and 1 EBR. Temperature and Humidity Control cabinet (D250086). General Precision Humidity Controller to monitor and control 2 coat and 2 develop modules. Ethylene glycol cabinet for temperature control on plate modules. Sold As Is.

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Used SVG 8826-8836

Inventory Number: 60931
Now (USD): $10,000.00

88 Series Photoresist Coater. Single track photoresist coater, two elevators, two robots, one spinner and one hot plate. Sold As Parts missing one robot.

Product Details

Used SVG Rite Track 8826-28-36

Inventory Number: 60930
Now (USD): $35,000.00

88 Series Dual Track Photoresist Coater and Developer. Fully automated system designed to uniformly coat wafers. Configuration - Track 1: Elevator, Robot, Spinner, Robot, Hot Plate, Robot, Elevator. Track 2: Elevator, Robot, Hot Plate, Robot, Chill Plate, Robot, Spinner, Robot, Elevator.  Controls - SVG-8826 SMC/8836HPO Coater, RT 8828/8836 HPO Developer, Two Rite Track digital temperature controllers TC1000. Does not include photoresist pumps or developer tanks.

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Used SVG Site Services 8632CTD/8636HPO

Inventory Number: 41192
Now (USD): $21,500.00

Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.

Product Details

Used Thermo Oriel ACCUDOSE 9000

Inventory Number: 53217
Now (USD): $15,000.00

Photospeed Tool Measures Batch to Batch Photospeed Variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.

Product Details

Used Ultrasonic Systems P450-1-151

Inventory Number: 57083
Now (USD): $25,000.00

Selective Coating System. Programmable selective coating system for precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray technology which enables more accurate, thinner coating applications than conventional spray and dispensing technology. Currently configured with CAT ILDS head. Conveyor system. Graphical user interface. 115V, 50/60 Hz, 13A, CE.

Product Details

Used Ultrasonic Systems P450

Inventory Number: 57148
Now (USD): $29,500.00

Selective Coating System. Programmable selective coating system for the precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray ultrasonic coating head which enables accurate thinner coating application than conventional spray and dispensing technology. Currently configured with Ultra-Spray CAT 35 ILDS head. Cartridge dispense system. Conveyor system. Graphical user interface. 120V, 50/60 Hz, 13A.

Product Details

Used Union Carbide Model 1010

Inventory Number: 61645
Now (USD): $29,000.00

Parylene Deposition System. Older system but will be sold in good working condition.

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