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Photoresist: Coaters - Tracks

Used Specialty Coating Systems PDS-2010

Inventory Number: 56987
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR SPECIALTY COATING SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Portable Parylene. Deposition System. Designed for deposition of protective parylene conformal coating. Small 12 in. dia. chamber. Includes vacuum pump.

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Used Specialty Coating Systems PDS 2090

Inventory Number: 58569
Now (USD): $69,000.00

Parylene Coating System. Parylene conformal coating deposition system. Fully automatic, manual and service modes of operation. PLC and microprocessor controller. System consists of an operator control panel, a vaporizer, furnace, vacuum system, cold trap and a stainless steel vacuum deposition chamber. Chamber Internal Usable Dimensions: 16 in. OD x 22 in. Refurbished Price: $69,000. Sold As Is: $39,000. 

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Used Specialty Coating Systems G3P-12

Inventory Number: 60959
Now (USD): $4,950.00

Precision Photoresist Spin Coater. Programmable model store and execute up to 30 programs with 20 steps each which are easily entered on the front panel LCD display and keypad. Rotational Speed: 0 to 9,999 rpm. Acceleration: 0.1 to 25.5 sec. 12-inch diameter bowl. 115V, 60 Hz.

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Used Specialty Coating Systems PDS 2010

Inventory Number: 61656
Now (USD): $21,500.00

Parylene Coating System with Chiller. Specialty Coating Systems portable parylene deposition system. Automatic operation, PLC control in auto mode the system pumps down to a preset pressure and the furnace cycles up to operating temperature. When proper temperature and pressure are established the vaporizer begins parylene sublimation. 12 in. dia. x 12 in. H stainless steel chamber. Substrate rotation plate. Includes mechanical chiller to eliminate the need for liquid nitrogen.

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Used SVG 90S

Inventory Number: 60611
Now (USD): $90,000.00

Vapor Prime/Coat Track System.  SVG Model 90S Clean Track System. 2 Coat, 2 Vapor Prime and 2 Develop modules and associated hot and cold bake plates, Cybor photoresist pumps. Chemical cabinet (D250085) with 6 chemicals - 3 photoresists, 1 developer, 1 HMDS and 1 EBR. Temperature and Humidity Control cabinet (D250086). General Precision Humidity Controller to monitor and control 2 coat and 2 develop modules. Ethylene glycol cabinet for temperature control on plate modules. Sold As Is.

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Used SVG 8826-8836

Inventory Number: 60931
Now (USD): $10,000.00

88 Series Photoresist Coater. Single track photoresist coater, two elevators, two robots, one spinner and one hot plate. Sold As Parts missing one robot.

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Used SVG Rite Track 8826-28-36

Inventory Number: 60930
Now (USD): $35,000.00

88 Series Dual Track Photoresist Coater and Developer. Fully automated system designed to uniformly coat wafers. Configuration - Track 1: Elevator, Robot, Spinner, Robot, Hot Plate, Robot, Elevator. Track 2: Elevator, Robot, Hot Plate, Robot, Chill Plate, Robot, Spinner, Robot, Elevator.  Controls - SVG-8826 SMC/8836HPO Coater, RT 8828/8836 HPO Developer, Two Rite Track digital temperature controllers TC1000. Does not include photoresist pumps or developer tanks.

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Used SVG Site Services 8632CTD/8636HPO

Inventory Number: 41192
Now (USD): $21,500.00

Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.

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Used Thermo Oriel ACCUDOSE 9000

Inventory Number: 53217
Now (USD): $15,000.00

Photospeed Tool Measures Batch to Batch Photospeed Variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.

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Used Ultrasonic Systems P450-1-151

Inventory Number: 57083
Now (USD): $25,000.00

Selective Coating System. Programmable selective coating system for precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray technology which enables more accurate, thinner coating applications than conventional spray and dispensing technology. Currently configured with CAT ILDS head. Conveyor system. Graphical user interface. 115V, 50/60 Hz, 13A, CE.

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