VAT PM5 Adaptive Pressure Controller with VAT F64-76996-01 Pressure Controlling Gate Valve.
VAT PM-5 Adaptive Pressure Vacuum Throttle Gate Valve Controller
VAT PM-5 valve controllers are used to control individual valves to adjust pumping speed throughput. These controllers can also accept data from measuring devices to automatically control process chamber pressure. The PM-5 is designed for the VAT series 64 servo-stepper.
6” O.D. Conflat DN100CF Flange