Temescal FCE-2700 E-beam Evaporator Deposition System
Six pocket electron gun deposition source in a load locked configuration.
The Temscal FCE-2700 is a clean room-compatible coater that offers high-throughput efficiency and lift-off capability at a source-to-substrate distance of
34″ (866mm).
The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. Operating in any of three password-protected modes, the TCS also offers process variable monitoring, process and historical trend tracking, and process data logging.
The TCS Automatic Mode
Auto Mode operation provides fully automated execution of user-programmed recipes consisting of up to twenty process steps, as well as full abort diagnostics. The TCS Auto Mode also offers independent autopump and autovent operations, automated cryopump regeneration, and automated rate-of-rise testing.
Manual Mode Operation
The TCS Manual Mode enables the user to set process parameters, operate major components and subsystems individually with full interlock protection, and execute nonautomated single-film deposition processes.
Product Chamber
- Dimensions in inches:
- Product chamber cryopump: CT-400, 17,500 L/Sec
- Water cooled product chamber walls
- Wide-angle viewport on front of system
- Spare port(s) for RGA or alternate access
- Left-side door for service access
Source Chamber
- Source-isolation valve allows product chamber access while source chamber remains under vacuum
- Source chamber cryopump: CT-8, 4,000 L/Sec
- Source Tray Dimensions in inches 20
- Drop-down, swing-out source tray, accessible from either clean room or chase side of vacuum cubicle
- Wide-angle 4” viewport
System
- Product Chamber Type: box
- Load Lock to isolate Product Chamber
- Cryopump water L/sec: 21,500
Pump down time: 1E-06 < 20mins
