Used MKS® Granville-Phillips® 390 Micro-Ion® ATM Vacuum Gauge Module

MKS^® Granville-Phillips^® 390 Micro-Ion^® ATM Vacuum Gauge Module

1x10^-9 Torr to Atmosphere Modular Vacuum Gauge

Model 390410-0-YG-T

MKS, Granville-Phillips 390 Micro-Ion ATM Vacuum Gauge Module combines proven Micro-Ion ionization vacuum gauge technology with a miniature Conductron^® heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion ATM Micro-Ion/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures.