Denton Vacuum Explorer 14 Dual Source E-beam and Thermal Evaporator with Crystal Deposition Rate Monitor

Denton Vacuum Explorer 14 Dual Source E-beam and

Thermal Evaporator with Crystal Deposition Rate Monitor

Deposition system configured with a 4-pocket e-gun and a single

boat type thermal source. Touchscreen PLC interface. Semiautomatic operation.

Quartz crystal thickness monitors for repeatable deposition results. Substrate rotation.

Quartz lamp substrate heaters. CTI Cryopump with compressor and rough pump.

Inside Dimensions: 22” L x 22” W x 42” H. Source to substrate distance 32”.

208V, 3Ph, 60 Hz, 80A.