Denton Vacuum DV-502A Single Target DC Sputtering System
Laboratory or short run production thin film deposition system.
Single 4” diameter DC magnetron cathode for sputtering of metallic films.
Automatic or manual vacuum system pump down. Utilizes a turbo pump
to achieve high vacuum and uses a dry scroll style pump for roughing the chamber.
Inficon XTM2 Crystal deposition rate monitor for deposition rate monitoring.
120V, 60Hz, 20A