Used ABM System 3HR

AB-M Mask Aligner and UV Exposure System. 350W lamp housing with power supply, currently configure with 200W bulb. Precision alignment stage.Mask Holder: 4” x 4” with 3” diameter substrate holder. Chuck and mask holder available for 2" substrates also. System will not do larger substrates.Exposure timer. Splitfield Zeiss microscope for easier alignment. 120V, 50/60 Hz.