Cascade Microtech ELITE 300 Precision Low Noise Automated Wafer Prober

Configured with a 300MM Femtoguard temperature chuck. The Elite™ 300 is essential for characterizing devices at the 32 nm technology node and beyond. This probe systems uses PureLine™ technology to achieve one of the lowest noise levels available on the market. Patented AttoGuard® and MicroChamber® technologies significantly improve low-leakage and low-capacitance measurements. An advanced linear air stage provides unprecedented stepping accuracy and wafer planarity across a wide temperature range of -60°C to 300°C. Additionally, the Elite features a “hands-free,” high-stability microscope bridge mount and delivers true optical magnification with the eVue™ digital imaging system. FEATURES / BENEFITS
Measurement Best solution for low-noise and 1/f measurements with advanced PureLine, AttoGuard and MicroChamber technologies
accuracy Minimize AC and spectral noise with effective shielding capability
Optimal test instrument integration
Positioning Precision linear-motor/ air-bearing stage for accurate positioning with temperature compensation
accuracy Precision sub-micron stepping with auto XYZ and theta correction
High-force Z stage
Productivity Unattended testing over multiple temperatures with VueTrack™ technology and High-Temperature Stability (HTS) enhancement
eVue digital imaging system with enhanced optical visualization, fast set-up, and in-die and wafer navigation
Powerful automation tools, such as automatic die-size measurements and wafer alignment
Flexibility and RF/microwave device characterization, 1/f, WLR, FA and design debug
application- Seamless integration between Velox and analyzers/measurement software
tailored Full thermal range of -60°C to +300°C
solutions Complete solution for small- and large-area multi-site probe cards
Large-area TopHat™, universal test accessories mounting system and rotatable universal platen ring
Versatile microscope mount system for fine-structure and large-area probing, and for wafer-level reliability test
Ease of use Comfortable and ergonomic operation
“Hands-free” microscope remote control, arm rest, and quick-access control panel
Low-profile design
Quick and comfortable wafer access via locking roll-out stage.