Neslab HX-75W Water Chiller from Plasma Therm PECVD Tool. Water cooled refrigeration system requires water cooling of refrigeration compressor. This chiller was removed from a Plasma Therm tool running in the fab. Temperature Range +5 to +35°C. Cooling Capacity 6820 BTU/HR at 20°C. TU-1 Pump Capacity 3GPM at 50 PSI.
208-230V, 1Ph, 60Hz, 30A