Semiconductor Equipment Corp 365 Tape Frame UV Curing 300mm
Revolutionary new design cures UV tapes quickly and uniformly, features a long-life light source and handles all size wafers up to 300mm. The Model 365 UV exposure system needs no external ventilation and has a small footprint.
Model 365 Capabilities:
· Cures most UV tape in 5 seconds
· Large exposure area cures up to 300 mm wafers.
· Programmable N2 purge and cure time
· Touch screen control
· Safety interlock to prevent operator exposure to UV light
· Self-diagnostic (alarm if LED fails, identifies faulty LED module)
· 10,000 hour LED life
· Generates no ozone
· Cooling fans temperature controlled
Specifications:
· 21.5” wide X 31.5” long X 5.5” high
· Weight: 55 pounds (25 kg)
· Power: 85-264 VAC: 10 Amp: 50/60 Hz
· Cover gas: 30 psi (2.07 BAR) @ 1.06 CFM or 30 LPM