Used Nanometrics 8300X

Zygo SXM300 Multimode Scanning Probe Microscope. The Magnascope SXM300 is a multimode probe microscope that measures sub-micron features to near angstrom-level resolution. It is designed for critical-dimension measurements of height, width, roughness and sidewall angles of 300mm wafers and masks of up to 9 in x 9 in. Sold As Is.

Semilab WT-2000PVN Multifunction Wafer Mapping Tool. Tabletop measurement system capable of performing a variety of measurements on PV cells, wafers and blocks. Configuration: Standard µ-PCD measurements. Max. 200 mm (8 in.) sample diameter on stage, manual loading. Wintau operating and evaluation software. Test: Minority lifetime accuracy and repeatability measurements on Semilab’s µ-PCD test sample. Diffusion length, internal quantum efficiency and reflectance accuracy and repeatability measurement on Semilab’s LBIC test sample. Test Wafers: 6-inch bare, polished, n-type wafer for µ-PCD test. (Id. V1020_035).

CDE Resmap 178 Four Point Probe Resistivity Mapping System. Designed to meet the needs of process development and tool characterization engineers, this four point probe has the accuracy, repeatability and reliability required. Wafer Size: 2” to 8” manual load. Typical Measurement Time: 1 sec. per site. Mapping Patterns: Polar map (align with notch/flat; rectangular map (choose inside edge exclusion); line scan (diameter, radius or any point to point diameter, minimum step 0.1mm); user defined (template). Measurement Range: 2 milliohms per sq. to 5 megaohms per sq. (can be optimized to 1 milliohm per sq.).

KLA/Tencor D-500 Stylus Profiler. The D-500 stylus profilers provide a wide range of application specific capabilities, meeting the needs of the research, engineering, and production communities. Stylus Profiling: The 140 mm sample stage supports scan lengths up to 30 mm in a single scan. The D-500 provides the highest vertical range at 1200µm and low force sensor technology at 0.03 mg, ensuring scan precision on an array of applications, including thin films, soft materials, tall steps. The D-500 features advanced optics that includes a high resolution 5 MP color camera with 4x digital zoom and enhanced lighting controls. Step Height Repeatability: A sub-Angstrom resolution, optical lever sensor translates into the most repeatable low mass, low noise sensor design. This enables step height repeatability of 5 Å on a 1µm step for demanding process needs.