Equipment Photos

Equipment Details

Inventory Number: 61635
Category: Photoresist: Coaters - Tracks
Manufacturer: AST Products

Parylene Deposition System. Computer controlled parylene coating system. Includes thickness monitor. Menu driven operation. Temperature is a key process parameter. There are three temperature zones in the system. The electrical components have been installed to allow addition of a fourth zone should it be required in the future. The three zones are the Sublimation, Pyrolysis and the Vacuum Gauge plumbing. The Sublimation oven uses a heater of about 850W at 120 VAC. The thermocouple is buried in the oven insulation and should not contact the glass sublimation tube. It is heated to between 80 and 130 deg C. The Pyrolysis oven uses a 2200W 208 VAC heater. The pyrolysis oven is factory set to 650 deg C. The thermocouple is mounted from the top and extends down into the insulation. The vacuum gauge plumbing heater is rated at 420W 120 VAC. The heater is factory set to 150 deg C. Heating the plumbing to 150 deg C prevents the deposition of parylene in the plumbing and on the sensing element of the pressure gauge. The deposition chamber is where the monomer created in the pyrolysis oven is deposited as a polymer. It contains the rack, which holds the parts to be coated. Chamber is 16 in. dia. x 17 in. D. System requires LN2 for cold trap. 208V, 3 Ph, 60 Hz, 20A.

Now (USD): $45,000.00

Products Similar to: AST Products CVD-P

Used AST Products CVD-P

Inventory Number: 61535
Now (USD): $45,000.00

Parylene Deposition System. Computer controlled parylene coating system. Includes thickness monitor. Menu driven operation. Temperature is a key process parameter. There are three temperature zones in the system. The electrical components have been installed to allow addition of a fourth zone should it be required in the future. The three zones are the Sublimation, Pyrolysis and the Vacuum Gauge plumbing. The Sublimation oven uses a heater of about 850W at 120 VAC. The thermocouple is buried in the oven insulation and should not contact the glass sublimation tube. It is heated to between 80 and 130 deg C. The Pyrolysis oven uses a 2200W 208 VAC heater. The pyrolysis oven is factory set to 650 deg C. The thermocouple is mounted from the top and extends down into the insulation. The vacuum gauge plumbing heater is rated at 420W 120 VAC. The heater is factory set to 150 deg C. Heating the plumbing to 150 deg C prevents the deposition of parylene in the plumbing and on the sensing element of the pressure gauge. The deposition chamber is where the monomer created in the pyrolysis oven is deposited as a polymer. It contains the rack, which holds the parts to be coated. Chamber is 16 in. dia. x 17 in. D. System requires LN2 for cold trap. 208V, 3 Ph, 60 Hz, 20A.

Product Details

Used Ultrasonic Systems P450-1-151

Inventory Number: 57083
Now (USD): $25,000.00

Selective Coating System. Programmable selective coating system for precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray technology which enables more accurate, thinner coating applications than conventional spray and dispensing technology. Currently configured with CAT ILDS head. Conveyor system. Graphical user interface. 115V, 50/60 Hz, 13A, CE.

Product Details

Used SVG Site Services 8632CTD/8636HPO

Inventory Number: 41192
Now (USD): $21,500.00

Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.

Product Details

Used FAS Technologies MicroE™ 200

Inventory Number: 42576
Now (USD): $32,000.00

Extrusion Coating System. Uses high precision extrusion technology to coat materials in a wide range of viscosities. Coats very thick layers (100 micrometers) in a single step. Repeatable digitally programmed process. Greater material utilization than spin coating (typical 75 percent of dispensed material remains on the wafer).

Product Details

Used FAS Technologies MicroE™ 200

Inventory Number: 42901
Now (USD): $39,000.00

Cassette to Cassette Extrusion Coating System with Stacked Bake/Chill Oven. System is capable of coatings over 100 micron thick in one process step with uniformities surpassing +/- 2 percent. Material utilization is 75 percent compared to 5-10 percent for spin coating. This means lower cost of material and reduced expense of waste disposal. Increased process uniformity. Uses high precision extrusion technology. Ability to coat materials in a wide range of viscosities. Repeatable digitally programmed process. With Genmark Mini Max Gencobot 7S/3L Handler. Model JS-9940 stacked bake unit with 3 ovens.

Product Details

Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

Product Details

Used Thermo Oriel Accudose 9000

Inventory Number: 53217
Now (USD): $12,500.00

Photospeed Tool Measures Batch to Batch Photospeed Variations. Photoresist testing system. Oriel part 83995 near UV system with fast shutter. Assures that exposure dosage is in-line with your process window requirements. No need to sideline your expensive stepper for photoresist testing. Provides accurate, incremented bulk area exposures across a wafer. Use it to quantify threshold exposure, spectra variations, find potential resist problems and verify lot to lot consistency.

Product Details

Used Ultrasonic Systems P450

Inventory Number: 57148
Now (USD): $29,500.00

Selective Coating System. Programmable selective coating system for the precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray ultrasonic coating head which enables accurate thinner coating application than conventional spray and dispensing technology. Currently configured with Ultra-Spray CAT 35 ILDS head. Cartridge dispense system. Conveyor system. Graphical user interface. 120V, 50/60 Hz, 13A.

Product Details

Used IVI Corp. Box Coater

Inventory Number: 57766
Now (USD): $16,000.00

PC controller. Crystal deposition rate controller. Heater power supply, quartz lamps inside. Resistance power supply. Inside Dimensions: 27 in. L x 27 in. D x 30 in. H. System does not have cryo or roughing pumps. Sold As Is, not complete.

Product Details

Used Headway Research CB-15

Inventory Number: 55891
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR HEADWAY RESEARCH SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Photoresist Spinner. Capable of spinning up to 9 in. dia. substrates. EC101-D controller. 15 in. dia. bowl. RPM Range: 50 to 10,000. Acceleration: 0.25 sec. to 1.25 sec. 115V, 50/60 Hz, 3A.

Product Details