Equipment Photos

Equipment Details

Inventory Number: 55643
Category: Evaporators
Manufacturer: CHA

CHA SEC-1000-RAP Dual Gun E Beam Evaporator. Used thin film deposition system. Two single pocket e-guns with individual power and sweep control. Inficon IC4 Plus deposition rate monitor. Temescal CV-8 E beam power supply. Auto-Tech II valve controller.  25.5 in. diameter water cooled stainless steel bell jar. CTI cryopump with compressor. Does not have substrate fixturing currently.

Now (USD): $55,000.00

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Inventory Number: 47000
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Unaxis BAK EVO (760) Multiple Source Thermal Evaporator. Used thin film deposition system. Proven modular design box coater system can be easily configured for many applications. Currently configured with 3 shutters and 8 water cooled power feed throughs. 3 Inficon XTC crystal deposition monitors each controlled via Khan computer. Substrate carrier for 8 in. dia. substrates. Khan process control with user friendly graphics. Fully integrated multi-tasking PC-based control system, monitors all process data, manages process recipes with built in failure diagnostics. CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down. Mfg. 2001. Very low hours. Sold As Is.

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Used Temescal FC-1800

Inventory Number: 53808
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Temescal FC-1800 Load-Locked Electron Beam Evaporator with Substrate Heaters. This fast cycle load-locked evaporator brings the bell jar down to operator level without sacrificing the throw distance. Cryopumped high vacuum system. Four pocket gun with Temescal Simba power supply. Bell Jar: 19½” I.D. Single substrate dome 17” dia. with rotation control. Includes substrate heaters. Auto valve sequencer. Needs hinge repaired.

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Used Temescal BJD-1800

Inventory Number: 55181
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Temescal BJD-1800 Electron Beam Evaporator. Used thin film deposition system. Maxtek crystal deposition rate monitor. Four pocket E-Gun. CV-14 E Beam power supply with sweep controls. Vacuum gauges. CTI cryopump with compressor. Does not have substrate heaters. Needs Hinge.

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Used CHA SE-1000-RAP

Inventory Number: 56323
Now (USD): $55,000.00

CHA SE-1000-RAP Multisource E Beam and Thermal Evaporation System for Optical Films and Oxygen Reactive Evaporations. Used thin film deposition system. Inficon IC-4 Plus rate and deposition controller. Six pocket electron beam source with SR-10 E-Beam power supply needs tube. Parts for optical monitor with system but not tested or covered under warranty. Two outrigger style filament resistance sources with 6 kW SCR controlled power supply. Automatic valve sequence controller. 25 in. dia. x 30 in. tall water cooled bell jar. Pressure control system for oxygen reactive evaporations. VHS-10 high speed diffusion pump. Quartz substrate heaters. Slide type fixturing for lift off process. Does not use substrate rotation type fixturing.

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Used CHA Bell Jar

Inventory Number: 57144
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CHA Bell Jar. Stainless steel. 25.75 in. OD, 29 in. tall.

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Used CHA SE-1000

Inventory Number: 57367
Now (USD): $55,000.00

CHA SE-1000 E-Beam Evaporator Deposition System. Used thin film deposition system. Electron beam high vacuum deposition system. Inficon IC4 crystal deposition rate monitor. Temescal CV-14 14 kW E-Beam power supply. Four pocket E-Gun. CTI cryopump with compressor and roughing pump. Quartz lamps for substrate heating. Automatic or manual vacuum valve sequencing. Water cooled stainless steel 25 in. dia. bell jar with hoist.

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Used Temescal VES-2550

Inventory Number: 57476
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Temescal VES-2550 E-Beam Evaporation System with Two Four Pocket E-Guns. Used thin film deposition system dual egun evaporator. Inficon IC4 crystal deposition monitor. Two four pocket electron guns with rotation controller. Temescal CV-8 E-Beam power supply. Currently configured with single fixed dome for 3 in. substrates (see photo). Water cooled 25 in. ID chamber. Automatic or manual valve control. CTI cryopump with compressor.

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Used CHA SE-600-RAP

Inventory Number: 57536
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CHA SE-600-RAP Single Pocket E-Beam Evaporator. Used thin film deposition system. Inficon IC6000 crystal deposition monitor. Triple dome planetary for 3 in. wafers. Automatic or manual valve control. Diffusion pump. Motorized hoist. 19 in. dia. bell jar. Temescal CV-8 E-beam power supply with controls. Single pocket e-gun with shutter.

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Used CHA SE-600

Inventory Number: 57550
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CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

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Used CHA SE-600-RAP

Inventory Number: 57558
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CHA SE-600-RAP Multiple Thermal Evaporation Source High Vacuum Deposition System. Used thin film deposition system. Physical vapor deposition system. 19 in. dia. water cooled bell jar with hoist. Inficon crystal deposition rate monitor. System has four thermal sources for evaporation of different materials. Source is selected via push button on front panel. System has controls for substrate heaters but none are installed. No substrate fixturing with system but rotation motor and controller are installed. Automatic valve sequencer. System uses a Varian VHS-6 high speed diffusion pump for high vacuum.  208V, 3 Ph, 60 Hz.

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