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Modular Process Technology

Used Modular Process Technology RTP-600S

Inventory Number: 61828
Now (USD): $19,500.00

Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp. Range: 250 to 1300 deg C. Quartz chamber. Up to six channels of MFC control. Highly uniform loop array with accurate control and monitoring. 208V, 3 Ph, 60 Hz, 80A.

Product Details

Used Modular Process Technology RTP-600S

Inventory Number: 61866
Now (USD): $19,500.00

Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp. Range: 250 to 1300 deg C. Quartz chamber. Up to six channels of MFC control. Highly uniform loop array with accurate control and monitoring. 208V, 3 Ph, 60 Hz, 80A.

Product Details