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Wafer Analysis

Used Sun International Sopra GESP-5

Inventory Number: 58885
Now (USD): $21,500.00

Variable Angle Broadband Spectroscopic Ellipsometer. Ellipsometer for complicated film stacks, mapping film thickness and optical properties. Has PMT detector. Wavelength: 250nm to 850nm. User friendly Windows® based interface. SOPRA ellipsometer that had been serviced by Angstrom Sun Technologies. Allows for variable angle broadband spectroscopic ellipsometry. Motorized 8 in. stage for 3D sample plots. Camera with zoom lens.

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Used Tencor SURFSCAN AIT Model 8010

Inventory Number: 40884
Now (USD): $29,000.00

Advanced In-Line Defect Inspection System. Automated full wafer inspection system for detecting particles as small as 0.10 micro-meters on bare silicon and patterned process wafers. High detection sensitivity even for difficult after-etch, develop, and chemical mechanical polishing. High throughput of up to 30 full wafer scans per hour on 200mm wafers.

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Used Tencor FLX 5200h

Inventory Number: 48127
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR TENCOR SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Automated Thin Film Stress Measurement System. Features patented dual wavelength technology which allows production monitoring of critical reliability problems caused by metal and dielectric film cracking, voiding,lifting and hillock formation. Data analysis features wafer topography measurement along diameter, trend plotting, calculation of water diffusion coefficient,automatic recalculation of stress when film or substrate thickness is corrected, and linear regression and calculation of stress-time gradients.

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Used Tencor FLX 2908

Inventory Number: 61745
Now (USD): $25,000.00

900 deg C Thin Film Stress Measurement System. Provides accurate analysis of thin film stress with very low measurement noise. Allows observation and quantitative evaluation of stress relaxation, oxide densification, thin film phase transformations and annealing. Scan range user programmable up to 200mm. Wafer Sizes: 125, 150, 200mm. 208V, 1 Ph, 60 Hz, 26A.

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Used Tencor FLX 2320

Inventory Number: 61825
Now (USD): $19,500.00

Thin Film Stress Measurement System. The Tencor FLX 2320 uses laser scanning technology to provide accurate measurement of thin film stress on all types of films and substrates. Stress can be monitored at temperatures to 500 deg C allowing better understanding of film properties both during processing and in the environment where the completed integrated circuit operates. Allows production monitoring of conditions which lead to critical reliability problems such as metal film and dielectric cracking, voiding, lifting and hillock formation. Flexible, menu-driven analysis software is easily learned and used by production operators. Any combination stress, bow, temperature, time or reflected light intensity measurements can be displayed. Older system but sold fully tested and in good working order.

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Used Tousimis  Automegasamdri 915B

Inventory Number: 55992
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR TOUSIMIS SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Supercritical 6 in. MEMS Wafer Critical Point Dryer. Microprocessor controller allows for complete automatic processing. Repeatable operating parameters. Chamber Size: 6.50 in. ID x 1.25 in. D. Can process up to 5 pieces of either 6 in., 4 in., 3 in., 2 in. wafers or 10mm sq. die per process run. LCO2 flow is controlled through micro. 120V, 50/60 Hz.

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Used Ulvac CRTM-9100G

Inventory Number: 62194
Now (USD): $1,500.00

Crystal Deposition Rate Controller. Low rate deposition with high resolution of film thickness can be achieved with this process controller. Controlling film thickness and deposition rate for evaporation processes. Controller only, no cables.

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Used Veeco Dektak 6M

Inventory Number: 57799
Now (USD): $2,950.00

Parts unit, not complete. Precision Surface Profiler. Precise step height measurements for thin films down to less than 100 angstroms. Low-inertia sensor technology. Programmable stylus force down to 1 milligram.Vertical range up to 262 microns. 10 angstroms, 1 sigma step height repeatability. Long scans up to 30mm. High resolution roughness measurements. Sample stage 150mm dia. 115V, 50/60 Hz, CE. Date of Mfg.: 12/05. Computer and Software missing. Sold As Is where is.

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Used Veeco Dektak 3

Inventory Number: 61153
Now (USD): $10,500.00

FULLY TESTED AND READY TO SHIP! 

Surface Profiler. Surface profile measuring system. Measures step height, surface roughness, waviness and curvature. High precision measurement for a broad range of applications. Sample Stage: 5 in. dia. Scan Length: 50 micrometers to 30mm. X-Y Stage Translation: 20mm to 80mm. Sensitivity to measure step heights below 100 angstroms. 120V, 60 Hz.

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Used Veeco Dektak 6M

Inventory Number: 61710
Now (USD): $15,000.00

Surface Profiler High Precision R&D Measurement Tool. Delivers a unique combination of precise measurements, ease of use and simplicity of design all in a compact, economical package. Low-inertia sensor technology improves measurement repeatability. Programmable stylus force down to 1 milligram enables scanning on soft surfaces. Vertical range up to 262 microns measures large steps for MEMS applications. With 10 angstrom, 1 sigma step height repeatability the Dektak 6M provides the flexibility to perform precise step height measurements for thin films down to less than 100 angstroms as well as thick-film measurements up to several hundred microns thick. Long-scans up to 30mm. Extremely stable baseline. Up to 30,000 data points per scan. 120V, 60 Hz, CE.

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