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Sputtering Systems

Used Gencoa Planar Magnetron Cathode

Inventory Number: 56692
Now (USD): $7,500.00

Magnetron cathode for sputtering over a large area. Target Size: 29-1/2 in. x 4-7/8 in.

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Used Kurt J. Lesker CMS-18

Inventory Number: 63009
Now (USD): Contact for Price

Six Target Load Locked RF DC Sputtering System. Dual chamber with load lock. Three cathodes in each chamber for total of six cathodes. PLC Process control (programmable depositions). Substrates up to 8 in. dia. Substrate rotation. Substrate bias, RF and DC. Substrate heater up to 500 deg C. 3-inch Magnetron sputter cathodes. Process Gases: Ar, O2, N2. RF and DC power supplies. CALL FOR PRICE.

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