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Power Supplies - RF-Plasma-E-Gun

Used Ehrhorn Technological Operations 80-S04

Inventory Number: 57964
Now (USD): $4,500.00

Two RF Generators for Applied Materials Cluster Tool. Previously used on Applied Materials HDP high density plasma chambers. Cannot test without controller. Sold AS IS with 30 day right to return.

Product Details

Used Electronic Measurements TCR20S90-1-D-0487-OV

Inventory Number: 46991
Now (USD): $450.00

20V, 90A DC Power Supply. 120V, 50/60 Hz.  2 Available.

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Used ENI RFC-4T

Inventory Number: 34998
Now (USD): $1,250.00

Controller. Links Plasma Generators & Matching Networks to Computers for digital metering and control.

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Used ENI RFC-2000

Inventory Number: 34906
Now (USD): $1,250.00

Controller. Links Plasma Generators & Matching Networks to Computers for digital metering and control.

Product Details

Used ENI DCG-200Z

Inventory Number: 43991
Now (USD): $1,950.00

Reactive Sputtering Power Supply. For reactive sputtering processes in which arcing is unavoidable, the low level arc energy and high arc sensitivity have important benefits. System output 20 kW. 380/480V, 3 Ph, 50/60 Hz.

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Used ENI LPI-10

Inventory Number: 52649
Now (USD): $3,500.00

Linear Pulsed Amplifier. Frequency Range: 10 - 86 MHz. Output Power: 1000W. Gain: 60 dB with gain flatness +/-1 dB.

Product Details

Used ENI Polara-260A

Inventory Number: 53297
Now (USD): $1,250.00

Pulsed Bipolar Power Supply. Power: 3 kW. P/N 260-01. Customer Part No.: 0190-01428. 208V, 3 Ph, 50/60 Hz, 30A, CE.

Product Details

Used ENI Polara-260A

Inventory Number: 53301
Now (USD): $1,250.00

Pulsed Bipolar Power Supply for Semiconductor Electroplating Applications. Power: 3 kW. Software modified Ver. 1.2 Test A. 208V, 3 Ph, 50/60 Hz, 30A.

Product Details

Used ENI VL-400 M2

Inventory Number: 53848
Now (USD): $1,250.00

Phase Shift Controller. Designed for use with OEM or ACG Series plasma generators. Provides additional flexibility for controlling RF power in plasma etching and sputtering applications at 13.56 MHz. The VL-400 is capable of producing up to three fixed-phase 13.56 MHz outputs and one additional phase shifted output. The phase shifted output can be varied from 0 to 500 degrees with respect to the fixed phase outputs.

Product Details

Used ENI LPG-1A-000-51

Inventory Number: 55603
Now (USD): $1,250.00

100 KHz 50W RF Generator. 50W RF output. Operating Frequency: 100 KHz. Water cooled. 208V, 1 Ph, 60 Hz.

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