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Power Supplies - RF-Plasma-E-Gun

Used Advanced Energy RFX II 5500

Inventory Number: 58064
Now (USD): $6,250.00

13.56 MHz 5500W RF Power Generator. Remote interface with front panel display only. Output Power: 100 to 5500W at an operating frequency of 13.56 MHz. Water cooled. 208V, 3 Ph, 50/60 Hz, CE. Model Number: 31550084-002A.

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Used Advanced Energy RFX II 5500

Inventory Number: 58071
Now (USD): $6,250.00

13.56 MHz 5500W RF Power Generator. Remote interface with front panel display only. Output Power: 100 to 5500W at an operating frequency of 13.56 MHz. Water cooled. 208V, 3 Ph, 50/60 Hz, CE.

Product Details

Used Advanced Energy Sparc Le 20

Inventory Number: 58393
Now (USD): $1,950.00

DC Pulsing Spark Arrestor. For use in reducing arcs in DC pulsed sputtering systems. 115V, 50/60 Hz. Max. Output Power: 10 kW. Pulse Frequency: 20 kHz. Reverse/Off Time: 5 microseconds. Operating Voltage: 150 to 1000 VDC. Spike Voltage Capability: 1800 VDC.

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Used Advanced Energy Pinnacle

Inventory Number: 57156
Now (USD): $5,250.00

12 kW DC Magnetron Power Supply. Delivers remarkable process consistency and control for significantly reduced variation and higher yields. Fast arc response. 4:1 impedance range. Max. Output Power: 12 kW. Model Number 3152363-005B. 208V, 3 Ph, 50/60 Hz, 41A.

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Used Advanced Energy Pinnacle

Inventory Number: 60571
Now (USD): $4,500.00

DC Magnetron Power Supply. Dual 6 kW. 150 to 800V voltage range with maximum output of 15A for each output. Full power over a 4:1 impedance range with no taps. Model 3152338-021. 208V, 3 Ph, 50/60 Hz, 41A.

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Used Advanced Energy MDX 10K

Inventory Number: 61985
Now (USD): $3,950.00

Low Z Fast DC Magnetron Power Supply. 380-415V, 50/60 Hz, 3 Ph, 25A.

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Used Astex A-2500 (Ulvac)

Inventory Number: 60451
Now (USD): $4,500.00

Microwave Generator. 2.45 GHz microwave generator with a maximum power output of 2500W. 208V, 3 Ph, 50/60 Hz.

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Used Comdel CXV-2000

Inventory Number: 53296
Now (USD): $1,950.00

Virtual-Quad Series RF Generator. Four complete user interfaces control four separate RF outputs. Output Frequency: 13.56 MHz. RF Outputs: 200W, 100V RMS, 50 ohms each. 208V, 1 Ph, 50/60 Hz, 5A, CE.

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Used Comdel CPS 1000/4

Inventory Number: 34462
Now (USD): $2,950.00

RF Generator. 4.000 MHz output. Output power up to 1000W. With Match Pro controller. No Matching Network, only control box. Water cooled. 208V, 3 Ph, 50/60 Hz.

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Used Comdel CLF-5000/400

Inventory Number: 60278
Now (USD): $5,500.00

5000W 400 kHz Low Frequency Power Supply. P/N FP154ORG. Designed to meet the performance demand in RF driven plasma systems. 400 kHz, 5000W. Output power leveled on delivered power. Fast auto-tune circuitry. Water cooled. Removed from Novellus tool. 208V, 3 Ph, 50/60 Hz, 25A.

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