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Photoresist: Coaters - Tracks

Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

Product Details

Used Solitec 5110-C

Inventory Number: 60108
Now (USD): $4,500.00

Photoresist Spinner Coater. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110 (8mm)

Inventory Number: 60427
Now (USD): $4,500.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110-SJ

Inventory Number: 60624
Now (USD): $5,250.00

High Pressure DI Water Substrate and Mask Cleaning System. Chucks for 5 in. x 5 in. or 6 in. x 6 in. squares. Substrate rotates as high pressure DI water removes particulates. Nitrogen blow off for drying.

Product Details

Used Solitec 5110

Inventory Number: 61829
Now (USD): $3,950.00

Single Head Wafer Processing Photoresist Spin Coater. Designed to coat wafers, masks and substrates. Simple design for low maintenance easy serviceability and high up-timer. Acceleration 1,000 to 40,000 rpm/sec. Digital display/timer with manual programming. Capable of 9 in. round, 6 in. square or 9 in. diagonal for rectangular substrate. 120V. Does not include resist dispense pump or parts.

Product Details

Used Solitec 5110-C-T

Inventory Number: 61856
Now (USD): $3,950.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process Sequence: Resist, spread, spin. Able to accommodate substrates up to 9 in. round or 6 in. square. 120V.

Product Details

Used Specialty Coating Systems PDS-2010

Inventory Number: 56987
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR SPECIALTY COATING SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Portable Parylene. Deposition System. Designed for deposition of protective parylene conformal coating. Small 12 in. dia. chamber. Includes vacuum pump.

Product Details

Used Specialty Coating Systems G3P-12

Inventory Number: 62063
Now (USD): $4,950.00

Precision Photoresist Spin Coater. Programmable model stores and executes up to 30 programs with 20 steps each. LCD display. Rotational Speed: 0 to 9,999 rpm. Acceleration: 0.1 to 25.5 sec. 12-inch diameter bowl. 110V, 1 Ph, 50/60 Hz, 2.5A, CE.

Product Details

Used SVG 90S

Inventory Number: 60611
Now (USD): $90,000.00

Vapor Prime/Coat Track System.  SVG Model 90S Clean Track System. 2 Coat, 2 Vapor Prime and 2 Develop modules and associated hot and cold bake plates, Cybor photoresist pumps. Chemical cabinet (D250085) with 6 chemicals - 3 photoresists, 1 developer, 1 HMDS and 1 EBR. Temperature and Humidity Control cabinet (D250086). General Precision Humidity Controller to monitor and control 2 coat and 2 develop modules. Ethylene glycol cabinet for temperature control on plate modules. Sold As Is.

Product Details

Used SVG 8826-8836

Inventory Number: 60931
Now (USD): $10,000.00

88 Series Photoresist Coater. Single track photoresist coater, two elevators, two robots, one spinner and one hot plate. Sold As Parts missing one robot.

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