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Photoresist: Coaters - Tracks

Used Solitec 5110 (8mm)

Inventory Number: 60427
Now (USD): $4,500.00

Photoresist Coater Developer. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

Product Details

Used Solitec 5110-SJ

Inventory Number: 60624
Now (USD): $5,250.00

High Pressure DI Water Substrate and Mask Cleaning System. Chucks for 5 in. x 5 in. or 6 in. x 6 in. squares. Substrate rotates as high pressure DI water removes particulates. Nitrogen blow off for drying.

Product Details

Used Solitec 5110

Inventory Number: 61829
Now (USD): $3,950.00

Single Head Wafer Processing Photoresist Spin Coater. Designed to coat wafers, masks and substrates. Simple design for low maintenance easy serviceability and high up-timer. Acceleration 1,000 to 40,000 rpm/sec. Digital display/timer with manual programming. Capable of 9 in. round, 6 in. square or 9 in. diagonal for rectangular substrate. 120V. Does not include resist dispense pump or parts.

Product Details

Used Specialty Coating Systems PDS 2060

Inventory Number: 62753
Now (USD): $59,000.00

High Capacity Parylene Conformal Coating System. Fully automatic vacuum deposition system. Designed for precise, consistent conformal coating production with high throughputs and simple operation. Will apply parylene conformal polymer coating to a variety of surfaces. This coating conforms precisely to the substrate shape, is pinhole free, has high dielectric strength, exceptionally high surface and volume resistivities and resists moisture, acids, alkalis, petroleum products and solvents. Chamber Size: 24 in. dia. x 24 in. D. 208V, 1 Ph, 60 Hz, 63A. Vacuum pump may be 3 phase.

Product Details

Used Specialty Coating Systems G3-8

Inventory Number: 62968
Now (USD): $3,950.00

Spin Coater. Accurately applies liquid coating materials such as photoresists, polyimides, metallo-organics, dopants and silica films on planar substrates. Single step coating profiles. Coating cycles are interruptible. Rotational Speed: 0 to 9.999 rpm. Dwell Time: 0 to 999 seconds in 1 second increments. 115V, 1 Ph, 60 Hz, CE.

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Used Specialty Coating Systems G3P-8

Inventory Number: 63069
Now (USD): $3,950.00

G3P-8 Spin Coater. Accurately applies liquid coating materials such as photoresists, polyimides, metallo-organics, dopants and silica films on planar substrates. Single step coating profiles. Coating cycles are interruptible. Rotational Speed: 0 to 9.999 rpm. Dwell Time: 0 to 999 seconds in 1 second increments. 115V, 1 Ph, 60 Hz, CE.

Product Details

Used Specialty Coating Systems P3201

Inventory Number: 63105
Now (USD): $7,500.00

Dip Coater. Precision dip coating system for coating of printed circuit boards in a production setting. Adjustable lift speeds 1 to 24 in. per min. Full coating coverage on both sides of assemblies. Removable tank. Air powered. System can be used to apply urethane, epoxy, silicone and acrylic coating as well as photo resists and solder mask materials.

Product Details

Used SVG 8826-8836

Inventory Number: 60931
Now (USD): $10,000.00

88 Series Photoresist Coater. Single track photoresist coater, two elevators, two robots, one spinner and one hot plate. Sold As Parts missing one robot.

Product Details

Used SVG Rite Track 8826-28-36

Inventory Number: 60930
Now (USD): $35,000.00

88 Series Dual Track Photoresist Coater and Developer. Fully automated system designed to uniformly coat wafers. Configuration - Track 1: Elevator, Robot, Spinner, Robot, Hot Plate, Robot, Elevator. Track 2: Elevator, Robot, Hot Plate, Robot, Chill Plate, Robot, Spinner, Robot, Elevator.  Controls - SVG-8826 SMC/8836HPO Coater, RT 8828/8836 HPO Developer, Two Rite Track digital temperature controllers TC1000. Does not include photoresist pumps or developer tanks.

Product Details

Used SVG Site Services 8632CTD/8636HPO

Inventory Number: 41192
Now (USD): $21,500.00

Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.

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