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Photoresist: Coaters - Tracks

Used Headway Research PWM32-PS-R790

Inventory Number: 60114
Now (USD): $3,950.00

Photoresist Spinner with Digital Programmable Controller. Mounted in a Headway cabinet. Up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks. Maximum substrate size up to 5-inch. Does not have dispense pumps or lines. Will need vacuum source for wafer hold-down. 120V, 60 Hz.

Product Details

Used Headway Research PWM32-R790

Inventory Number: 61325
Now (USD): $5,250.00

Photoresist Spinner Mounted in Exhaust Hood Table. Spin coater for substrates up to 5 in. diameter or diagonal. The bowl diameter is 7.9 in. ID. Up to 10,000 rpm for relatively light loads such as silicon wafers or small photomasks. Two HDP98 pump fluid dispensers included at no additional price but these are not tested or part of warranty. PWM32 digital controller. Unit is mounted on a table with a stainless fume hood. 120V, 50/60 Hz, 10A.

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Used Headway Research 1-PM101D-R485

Inventory Number: 62322
Now (USD): $2,500.00

Photo Resist Spinner with Motor Control Unit. Extremely versatile and reliable line of equipment for coating silicon and germanium wafers and large glass and ceramic substrates with photo sensitive material. Great flexibility for labor production line. Close loop servo control amplifier and electro-dynamic brake. Digital tachometer and automatic cycle timer. Adjustable acceleration from 50 to 5,000 rpm/sec. 8-inch dia. bowl. Vacuum chuck.

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Used IVI Corp. Box Coater

Inventory Number: 57766
Now (USD): $16,000.00

PC controller. Crystal deposition rate controller. Heater power supply, quartz lamps inside. Resistance power supply. Inside Dimensions: 27 in. L x 27 in. D x 30 in. H. System does not have cryo or roughing pumps. Sold As Is, not complete.

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Used Karl Suss RC8-MS3

Inventory Number: 60633
Now (USD): $8,500.00

Photoresist Spinner. Unique design provides a better uniformity than conventional spin coaters. Reduces resist consumption by up to 50 percent. Fully programmable process parameters. Handles up to 8 in. round substrates. (Depends on chuck installed). 110V, 60 Hz, CE.

Product Details

Used Laurell Spinner

Inventory Number: 55123
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR LAURELL SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Digital readouts. Manual controls. Max. Speed: 2400 rpm. No load. 12 in. dia. bowl. Custom top cover. 115V, 60 Hz.

Product Details

Used Laurell WS-500-8TFM

Inventory Number: 60386
Now (USD): $12,000.00

WS-500 Series Spin Processor Developing Station for up to 200mm Wafers. Process spinner. For cleaning, etching, developing processes on wafers up to 200mm. Features a locked, counter balanced, clear dome chamber for a protected view of the process without exposure to vapors or chemicals. Mounted in a Bettcher RA36FRPP wet bench. Up to 20 fifty step programs can be stored in the controller. 120V, 60 Hz.

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Used Para Tech LabTop

Inventory Number: 62813
Now (USD): $17,500.00

Compact Bench Top Parylene Conformal Coating System. The compact LabTop by Para Tech is designed for coating small substrates and modules in laboratory, R&D and short run production settings. Its 8 in. by 9 in. stainless steel chamber can also accommodate larger devices for prototyping and research and development applications. Features the same automated process features and vacuum coating precision as full size Para Tech coating systems. Ideal for application development as well as short run production coating of printed circuit boards, medical components, electronic sensors and other small substrates. Tangential entry and exit of the polymerizing monomer results in an extremely low coating thickness gradient as well as superior film uniformity. Produces very thin Parylene film for optical applications and microwave components. CE compliant.

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Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

Product Details

Used Solitec 5110-C

Inventory Number: 60108
Now (USD): $4,500.00

Photoresist Spinner Coater. Does not include resist dispense pumps or parts. Manual load photoresist spinner. Programmed cycle times. Acceleration variable from 1,000 to 40,000 rpm/sec. Speed adjustable from 200 to 10,000 rpm. Digital tachometer. Process sequence resist, spread, spin. Can accommodate substrates up to 9 in. round or 6 in. square. 115V, 60 Hz.

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