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Cleaning Systems

Used UVOCS T16X16/OES/E

Inventory Number: 47382
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR UVOCS SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Ultraviolet-Ozone Cleaning System. Cleaning or oxidation with the UVOCS is accomplished by the combination of ultraviolet light and ozone. Low pressure quartz-mercury vapor lamp which generates UV emissions inthe 254 and 185 nanometer range. Source Size: 16 in. x 16 in. Active Area: 256 sq. in. Width: 20 in. Depth: 29-3/4 in. Height: 14-1/2 in. 110 V, 60 Hz, 5.0A.

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Used UVOCS T10X10/OES

Inventory Number: 62019
Now (USD): $4,500.00

Ultra Violet Ozone Cleaning System. Active Area: 100 sq. in. Sliding parts tray height to 1.5 in. Lamp units 245 nm UV. Digital controller. 3 in. exhaust port. 110V, 60 Hz.

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Used UVOCS T10X10/OES

Inventory Number: 62384
Now (USD): $4,500.00

Ultra Violet Ozone Cleaning System. Active Area: 100 in. sq. Sliding parts tray height to 1.5 in. Lamp units 245nm UV. Digital controller. 115V, 60 Hz, 2.5A.

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Used UVP PR-100

Inventory Number: 62199
Now (USD): $1,950.00

Ozone Surface Cleaner. A photochemical interaction occurs in an atmosphere of ultraviolet radiation and ambient air that generates ozone. As the molecules of an organic contaminant become active under ultraviolet radiation they dissociate. The organic contaminants then decompose into harmless volatile gases such as carbon dioxide. The PR-100 produces surfaces meticulously free of contamination. Chamber: 11-1/8 in. x 11-5/8 in. x 3-1/8 in.

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Used Verteq GFM-CMP-200M-G2L-E0

Inventory Number: 58154
Now (USD): $29,000.00

Goldfinger Megasonic Single Wafer Cleaning System. Megasonic sound waves are used to scrub surfaces clean of particles and contamination. System is controlled and operated using a LCD handheld pendant. System removes residue from advanced semiconductor devices with design rules below 130nm without damaging gate stacks, bit lines or vulnerable thin films. Comes with wafer holder for 4 in., 6 in. and 8 in. wafers. Manual loading. 120V, 50/60 Hz, 21A.

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Used Yieldup Omega 6200

Inventory Number: 52683
Now (USD): $29,000.00

Megasonic Wafer Cleaning System. Robot assist between 2 tanks. Set up for 2 - 200 mm cassettes. Tank 1: 11 in. L x 20 in. W x 15 in. H is a quartz megasonic tank with 3 - 600W KAJO megasonic generators. Tank 2: 12 in. L x 20 in. W x 14 in. H is a YieldUp dryer tank with N2 purge and gas injection capability. Overall Dimensions: 60 in. L x 60 in. W x 88 in. H. Mfg. Date: 12/97.

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