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Cleaning Systems

Used Semitool STI SRD-240S-3-1-E-ML

Inventory Number: 60743
Now (USD): $3,950.00

Tabletop Spin Rinse Dryer. High performance cleaning, rinsing and drying. The SRD is a 25 wafer batch size single chamber tool. The spin rinser dryer utilizes a DI water spray onto the cassette of wafers as they are rotating inside the stainless chamber. Afterwards a nitrogen purge drys the parts. Single bolt rotor A189-40-09. Model PSC-101 digital controller. 120V, 50/60 Hz, 15A.

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Used Semitool STI 300mm Spinner

Inventory Number: 61573
Now (USD): $18,000.00

Spin Rinse Dryer. Single stack front loading SRD. Currently configured for processing of 12-inch 300mm wafers. Has Model A300-13KG-0215 rotor installed, 1000 rpm max. on this rotor, Bal 5 slots. PSC-102 digital controller. Cleans cassette of wafers using DI water spray as the cassette spins and an N2 drying process after cleaning. 208V, 3 Ph, 50/60 Hz, 20A.

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Used Sono-Tek Cleaning Systems IG-200 PCB

Inventory Number: 58038
Now (USD): $15,000.00

Ultrasonic IPA Degreasing, Cleaning and Drying System. Used to degrease, clean and dry printed circuit board and hybrid assemblies using isopropyl alcohol as the cleaning solvent. Fully automatic PLC controller and can be set up to perform a variety of multiple step processes. Includes ultrasonic agitation option and spray option. Tank Size Below Cooling Coils: 20.5 in. L x 11.5 in. W x 17 in. D. 208V, 3 Ph, 50/60 Hz.

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Used SVG Brush Cleaner

Inventory Number: 55584
Now (USD): $3,950.00

Double sided brush cleaner with some missing parts. Parts Machine. Call for more photos.

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Used UVOCS T10X10/OES/W

Inventory Number: 55093
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR UVOCS SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Ultraviolet Ozone Cleaning System with Bottom Up Lighting Configured for 4 in. Wafers. This version has the UV lights on the bottom and the tray has cut outs for 4 in. dia. substrates. Fast method for obtaining ultra-clean surfaces free of organic contaminants. 10 in. x 10 in. source size. Ozone exhaust shroud. 115V, 60 Hz, 2.5A.

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Used UVOCS T16X16/OES/E

Inventory Number: 47382
Now (USD): Contact for Price

THIS UNIT IS SOLD. WE WOULD LIKE TO BUY YOUR UVOCS SYSTEMS. PLEASE CONTACT US IF YOU HAVE SYSTEMS TO SELL. * * * * * * * * * * * * * * * * * * * * * * * * * * Ultraviolet-Ozone Cleaning System. Cleaning or oxidation with the UVOCS is accomplished by the combination of ultraviolet light and ozone. Low pressure quartz-mercury vapor lamp which generates UV emissions inthe 254 and 185 nanometer range. Source Size: 16 in. x 16 in. Active Area: 256 sq. in. Width: 20 in. Depth: 29-3/4 in. Height: 14-1/2 in. 110 V, 60 Hz, 5.0A.

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Used UVOCS T10X10/OES

Inventory Number: 62019
Now (USD): $4,500.00

Ultra Violet Ozone Cleaning System. Active Area: 100 sq. in. Sliding parts tray height to 1.5 in. Lamp units 245 nm UV. Digital controller. 3 in. exhaust port. 110V, 60 Hz.

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Used UVP PR-100

Inventory Number: 62199
Now (USD): $1,950.00

Ozone Surface Cleaner. A photochemical interaction occurs in an atmosphere of ultraviolet radiation and ambient air that generates ozone. As the molecules of an organic contaminant become active under ultraviolet radiation they dissociate. The organic contaminants then decompose into harmless volatile gases such as carbon dioxide. The PR-100 produces surfaces meticulously free of contamination. Chamber: 11-1/8 in. x 11-5/8 in. x 3-1/8 in.

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Used Verteq GFM-CMP-200M-G2L-E0

Inventory Number: 58154
Now (USD): $29,000.00

Goldfinger Megasonic Single Wafer Cleaning System. Megasonic sound waves are used to scrub surfaces clean of particles and contamination. System is controlled and operated using a LCD handheld pendant. System removes residue from advanced semiconductor devices with design rules below 130nm without damaging gate stacks, bit lines or vulnerable thin films. Comes with wafer holder for 4 in., 6 in. and 8 in. wafers. Manual loading. 120V, 50/60 Hz, 21A.

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Used Yieldup Omega 6200

Inventory Number: 52683
Now (USD): $29,000.00

Megasonic Wafer Cleaning System. Robot assist between 2 tanks. Set up for 2 - 200 mm cassettes. Tank 1: 11 in. L x 20 in. W x 15 in. H is a quartz megasonic tank with 3 - 600W KAJO megasonic generators. Tank 2: 12 in. L x 20 in. W x 14 in. H is a YieldUp dryer tank with N2 purge and gas injection capability. Overall Dimensions: 60 in. L x 60 in. W x 88 in. H. Mfg. Date: 12/97.

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