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Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600
Used CHA SE-600

Used CHA SE-600

  • $49,500.00

Sku: 57550

CHA SE-600 High Vacuum E-Beam Evaporation System. Used thin film deposition system. PVD physical vapor deposition system. 19 in. dia. water cooled bell jar. Triple dome planetary fixturing currently configured for 3 in. dia. wafers. Inficon IC6000 crystal deposition rate monitor. Automatic valve sequencer. Four pocket E-gun with manual rotation control. Does not have auto pocket sequencer, manual only. Temescal CV-8 E-Beam power supply with controls. System uses a Varian VHS-6 diffusion pump for high vacuum.

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