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Equipment Details

Inventory Number: 61568
Category: RTP
Manufacturer: Jipelec

Rapid Thermal Processing System with Vacuum Chamber. PC controller. Temperature measurement control system provides accurate and repeatable thermal control across the temperature range. Temperatures up to 1300 deg C. Multi-zone halogen lamp furnace. Ramp Rate: 1 deg C/s to 400 deg C/s. Max. Substrate Size: 6 in. dia. Process gas lines. Includes roughing pump. 220V, 3 Ph, 50/60 Hz, 100A, CE. Unit will be tested for an accuracy of +/-5 deg C from setpoint.

Now (USD): $32,500.00

Products Similar to: Jipelec JetFirst 150

Used Process Products Corporation RTM 2018H-BT-M 2FM-ADS-SP

Inventory Number: 58938
Now (USD): $4,950.00

Rapid Thermal Processing Batch Furnace. Digital controllers. Ambient to 1200 deg C. Quartz Chamber: 8 in. ID x 24 in. D. Automatic door assembly, double O-Ring vacuum sealed. 208V, 3 Ph, 60 Hz. Furnace only. No addition: Quartzware or vacuum pump.

Product Details

Used AG Associates Heatpulse 610

Inventory Number: 60678
Now (USD): $19,000.00

Benchtop RTP Rapid Thermal Processor. Benchtop system for rapid thermal processing of semiconductor wafers up to 6 in. dia. max. (Depends on wafer tray with system). Programmable ramp up rates. Peak Temp.: 1350 deg C. Recommended Steady State Temp. Range: 400 to 1150 deg C. 208V, 1 Ph, 60 Hz, 90A.

Product Details

Used Modular Process Technology RTP-600S

Inventory Number: 61828
Now (USD): $19,500.00

Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp. Range: 250 to 1300 deg C. Quartz chamber. Up to six channels of MFC control. Highly uniform loop array with accurate control and monitoring. 208V, 3 Ph, 60 Hz, 80A.

Product Details

Used Modular Process Technology RTP-600S

Inventory Number: 61866
Now (USD): $19,500.00

Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data aquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp. Range: 250 to 1300 deg C. Quartz chamber. Up to six channels of MFC control. Highly uniform loop array with accurate control and monitoring. 208V, 3 Ph, 60 Hz, 80A.

Product Details

Used Jipelec SiC Furnace

Inventory Number: 58065
Now (USD): $15,000.00

High Temperature Batch Furnace. Designed to provide high temperature uniformity and long process capability. Temp. Range: 700 deg C to 2000 deg C. Ramp Rate: Up to 15 deg C/s. Pyrometer Control: 500 deg C to 2000 deg C. For small substrates up to 2 in. dia. Can be used with vacuum pump, not included. 208V, 3 Ph, 60 Hz, 67A, CE.

Product Details