Equipment Photos

Equipment Details

Inventory Number: 59351
Category: PECVD - Oxidation
Manufacturer: Applied Materials

Factory Interface Load Station. Front end load station for Applied Materials Endura or Centura platforms. 300mm FOUP interface.

Now (USD): $35,000.00

Products Similar to: Applied Materials Endura 5X

Used Aviza Process Module

Inventory Number: 55576
Now (USD): $10,000.00

Oxide Process Module for Nano-ALD System. Process module only, no pumps. 300mm. Sold not tested with 30 day right to return.

Product Details

Used Aviza NANO-ALD

Inventory Number: 55443
Now (USD): $19,000.00

Brooks Automation Gemini Express Vacuum Cluster Tool Integration Platform. No vacuum pumps included. Removed from service, nice condition. Sold not tested with 30 day right to return.

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Used Aviza AL203

Inventory Number: 55593
Now (USD): $10,000.00

Process Module for Nano-ALD System. Process module only, no pumps. 300mm. Sold not tested with 30 day right to return.

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Used Roth & Rau AK800

Inventory Number: 58630
Now (USD): $99,000.00

Silicon Nitride PECVD System. Plasma Enhanced Chemical Vapor Deposition system. The system uses gases (primarily silane and ammonia) to deposit thin layers of silicon nitride used in anti-reflective coating in solar industry. Using plasma excitation this is possible at low temperatures of 300-500 deg C. The system is constructed to be an R&D tool so it allows all kinds of thin film depositions (depending on gases used as sources). Process Area: 400mm x 450mm. Deposition Rates: Up to 500nm/min for Si-based films. Mfg.:2008. $69,000 AS IS. $99,000 Fully Tested.

Product Details

Used Plasmatherm Unaxis 790

Inventory Number: 58884
Now (USD): $125,000.00

ICP Plasma Etch System. Inductively coupled plasma etching system for high etch rates and control over selectivity and damage. PC controller with graphical user interface. 9.5 in. bottom electrode, ceramic clamp currently for 2 in. wafer. Chamber pumped via turbo pump with rough pump. RF Generators: RFPP5S 500W, 13.56 MHz and RFPP10M 1000W, 2 MHz. Six MFC mass flow gas controllers. Previous Gases used: CL2, SF6, N2, CF4, AR, BCL3. AS IS Price: $99,000. Refurbished: $125,000.

Product Details

Used Oxford Instruments Plasmalab 800 Plus PECVD

Inventory Number: 60810
Now (USD): $99,000.00

Large Capacity Open Loaded Plasma Enhanced Chemical Vapor Deposition System. A 460mm diameter electrode offers a capacity of up to twelve 4 in. wafers. Ideally suited for batch PECVD processing where excellent across chamber uniformity of less than 2 percent is achieved for silicon nitride and silicon dioxide layers. Last owner had set up for 2 in. wafers. 18.75 in. top electrode with shower head gas input. Footprint is kept to a minimum by locating all electronics and vacuum components within the body of the tool, mass flow controllers are housed separately in a wall mounted gas pod. Six MFC gas controllers, previously used gases He, N2, N2O, NH3, SIH4/N2, CF4. PC controller provides intuitive user interaction with the system via advanced graphics and process recipe pages. Includes vacuum pump and blower package. Mfg. 2009, nice condition.

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Used Dockweiler Chemicals Heatexchanger 20000

Inventory Number: 60895
Now (USD): $950.00

Stainless Steel Bubbler Heatexchanger.

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Used Dockweiler Chemicals Heatexchanger 8000

Inventory Number: 60896
Now (USD): $950.00

Stainless Steel Bubbler Heat Exchanger.

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Used Applied Materials Excite

Inventory Number: 45994
Now (USD): $7,000.00

High Speed Particle Detection System for Bare Wafer or Patterned Wafer Inspection. Inspects device wafers after processing is completed or inspects blanket films. Blanket films can be inspected at over 60 wafers per hour and patterned wafers at over 45 wph. .1 micrometer particle detection on unpatterned silicon. Windows NT operating system. Currently configured for 200mm wafers but can be configured for 300mm. Date of Mfg. 2003. Sold As Is with 30 day right of return.

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Used Applied Materials IPUP A100L

Inventory Number: 58948
Now (USD): $4,950.00

Dry Vacuum Pump. Alcatel 100L dry pump. For clean oil free pumping. Reduced volume and footprint. Advanced monitoring functions. Water cooled motor. AMAT interface. Peak Pumping Speed: 63 cfm. 208V, 3 Ph, 50/60 Hz, 12A, CE. Sold fully tested in good condition, not rebuilt.

Product Details