Equipment Photos

Equipment Details

Inventory Number: 61535
Category: Photoresist: Coaters - Tracks
Manufacturer: AST Products

Parylene Deposition System. Computer controlled parylene coating system. Includes thickness monitor. Menu driven operation. Temperature is a key process parameter. There are three temperature zones in the system. The electrical components have been installed to allow addition of a fourth zone should it be required in the future. The three zones are the Sublimation, Pyrolysis and the Vacuum Gauge plumbing. The Sublimation oven uses a heater of about 850W at 120 VAC. The thermocouple is buried in the oven insulation and should not contact the glass sublimation tube. It is heated to between 80 and 130 deg C. The Pyrolysis oven uses a 2200W 208 VAC heater. The pyrolysis oven is factory set to 650 deg C. The thermocouple is mounted from the top and extends down into the insulation. The vacuum gauge plumbing heater is rated at 420W 120 VAC. The heater is factory set to 150 deg C. Heating the plumbing to 150 deg C prevents the deposition of parylene in the plumbing and on the sensing element of the pressure gauge. The deposition chamber is where the monomer created in the pyrolysis oven is deposited as a polymer. It contains the rack, which holds the parts to be coated. Chamber is 16 in. dia. x 17 in. D. System requires LN2 for cold trap. 208V, 3 Ph, 60 Hz, 20A.

Now (USD): $45,000.00

Products Similar to: AST Products CVD-P

Used AST Products CVD-P

Inventory Number: 61635
Now (USD): $45,000.00

Parylene Deposition System. Computer controlled parylene coating system. Includes thickness monitor. Menu driven operation. Temperature is a key process parameter. There are three temperature zones in the system. The electrical components have been installed to allow addition of a fourth zone should it be required in the future. The three zones are the Sublimation, Pyrolysis and the Vacuum Gauge plumbing. The Sublimation oven uses a heater of about 850W at 120 VAC. The thermocouple is buried in the oven insulation and should not contact the glass sublimation tube. It is heated to between 80 and 130 deg C. The Pyrolysis oven uses a 2200W 208 VAC heater. The pyrolysis oven is factory set to 650 deg C. The thermocouple is mounted from the top and extends down into the insulation. The vacuum gauge plumbing heater is rated at 420W 120 VAC. The heater is factory set to 150 deg C. Heating the plumbing to 150 deg C prevents the deposition of parylene in the plumbing and on the sensing element of the pressure gauge. The deposition chamber is where the monomer created in the pyrolysis oven is deposited as a polymer. It contains the rack, which holds the parts to be coated. Chamber is 16 in. dia. x 17 in. D. System requires LN2 for cold trap. 208V, 3 Ph, 60 Hz, 20A.

Product Details

Used Ultrasonic Systems P450-1-151

Inventory Number: 57083
Now (USD): $25,000.00

Selective Coating System. Programmable selective coating system for precise application of a wide range of materials for the semiconductor, electronics, medical and industrial markets. Features Ultra-Spray technology which enables more accurate, thinner coating applications than conventional spray and dispensing technology. Currently configured with CAT ILDS head. Conveyor system. Graphical user interface. 115V, 50/60 Hz, 13A, CE.

Product Details

Used Cee 3000

Inventory Number: 53127
Now (USD): $4,500.00

Automated Precision Hot Plate. Digital program controller. Automated wafer transfer system for complete hands off wafer processing. Temp. Range: 50 to 300 deg C with uniformity across work surface of +/- 0.3 percent. 220V, 1 Ph, 60 Hz.

Product Details

Used Semiconductor Systems PBCS31/3

Inventory Number: 26885
Now (USD): $950.00

Dual Track System Coat and Develop. Can be configured to process wafers from 3 in. to 6 in. in dia. Track no. 1 Cassette - Bake - Coat - Bake - Cassette. Track no. 2 Cassette - Bake - Coat - Bake - Cassette. Sold AS IS.

Product Details

Used SVG Site Services 8632CTD/8636HPO

Inventory Number: 41192
Now (USD): $21,500.00

Developer-Exposure Track. Single track developer configured with 2 elevators, one spinner and one bake. System has an OAI 0130-042-20 deep UV. 220 nanometer exposure tower capable of up to 2000W. Currently configured for 4 in. wafers.

Product Details

Used FAS Technologies MicroE™ 200

Inventory Number: 42576
Now (USD): $32,000.00

Extrusion Coating System. Uses high precision extrusion technology to coat materials in a wide range of viscosities. Coats very thick layers (100 micrometers) in a single step. Repeatable digitally programmed process. Greater material utilization than spin coating (typical 75 percent of dispensed material remains on the wafer).

Product Details

Used FAS Technologies MicroE™ 200

Inventory Number: 42901
Now (USD): $39,000.00

Cassette to Cassette Extrusion Coating System with Stacked Bake/Chill Oven. System is capable of coatings over 100 micron thick in one process step with uniformities surpassing +/- 2 percent. Material utilization is 75 percent compared to 5-10 percent for spin coating. This means lower cost of material and reduced expense of waste disposal. Increased process uniformity. Uses high precision extrusion technology. Ability to coat materials in a wide range of viscosities. Repeatable digitally programmed process. With Genmark Mini Max Gencobot 7S/3L Handler. Model JS-9940 stacked bake unit with 3 ovens.

Product Details

Used MTI Multifab S3

Inventory Number: 51541
Now (USD): $750.00

Photoresist Coating Track System. Wafer is transferred from elevator to bake and spin coat modules via robotic arm. All process parameters are programmed on the system monitor using a light pen. Sold As Is.

Product Details

Used Solitec OptiTrac

Inventory Number: 51544
Now (USD): $25,000.00

Photoresist Developer. Cassette to cassette photoresist developer. Single spin develop module, 2 bake cool modules. PC controller. Small cleanroom footprint. User friendly software.

Product Details

Used MTI S3 Flexifab Parts System

Inventory Number: 51548
Now (USD): $1,450.00

S3 Photoresist Coating System. Parts system only. Includes spin, elevator and control units. Missing some parts. Call for detailed photos.

Product Details