||Photoresist: Coaters - Tracks
Parylene Deposition System. Computer controlled parylene coating system. Includes thickness monitor. Menu driven operation. Temperature is a key process parameter. There are three temperature zones in the system. The electrical components have been installed to allow addition of a fourth zone should it be required in the future. The three zones are the Sublimation, Pyrolysis and the Vacuum Gauge plumbing. The Sublimation oven uses a heater of about 850W at 120 VAC. The thermocouple is buried in the oven insulation and should not contact the glass sublimation tube. It is heated to between 80 and 130 deg C. The Pyrolysis oven uses a 2200W 208 VAC heater. The pyrolysis oven is factory set to 650 deg C. The thermocouple is mounted from the top and extends down into the insulation. The vacuum gauge plumbing heater is rated at 420W 120 VAC. The heater is factory set to 150 deg C. Heating the plumbing to 150 deg C prevents the deposition of parylene in the plumbing and on the sensing element of the pressure gauge. The deposition chamber is where the monomer created in the pyrolysis oven is deposited as a polymer. It contains the rack, which holds the parts to be coated. Chamber is 16 in. dia. x 17 in. D. System requires LN2 for cold trap. 208V, 3 Ph, 60 Hz, 20A.