||Photoresist: Coaters - Tracks
Cassette to Cassette Photoresist Spinner with Hot Plate Bake and Cool. Fully programmable automated coat/bake track system. Currently configured for 6 in. squares. Spinner with backside rinse. Max. Spin Speed: 6000 rpm. Programmable acceleration control from 1 to 30,000 rpm/sec. Storage of 10 recipes with up to 10 steps/recipes. Hot Plate Max. Temp.: 300 deg C. Programmable proximity, gravity contact and vacuum contact. Cooling plate.