Ulvac

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 30"H. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Multiple shutter actuators and feed throughs on bottom of chamber. Crystal sensors. Chamber in nice condition. Chamber sold as is not tested.

Ulvac Cryo-U8H Cryo Pump. 9.5"OD, 8.375" ID ISO flange. Unit came off of a working system. 2 UNITS AVAILABLE

Ulvac Cryo-U8HL Cryo Pump. 9.5"OD, 8.375" ID ISO flange. Unit came off of a working system. 2 UNITS AVAILABLE

Ulvac CRYO-U10HL Rebuilt 10" Cryo Pump. Pumping speed 240L/S. 11.5" OD ISO-K Flange.

Ulvac C30B Cryo Compressor. 220V, 3Ph, 50/60Hz, 17A