Inventory Number: 64700
Retail (USD):
$1,250.00
Now (USD):
$1,250.00
Shimadzu EI-1003M Turbo Molecular Pump Controller. USed on TMP-803 and TMP-1003 turbo pumps.
Product Details
Inventory Number: 64613
Retail (USD):
$6,500.00
Now (USD):
$6,500.00
Signatone S-1160A-5 Manual Analytical Wafer Probe Station. Wafer prober designed to support a broad range of precision probing applications. 5” diameter vacuum chuck with 5” x 5” stage travel. Linear platen lift. Platen accepts vacuum or magnetic base probe manipulators. Fine platen adjustment. Mitutoyo Microzoom microscope with two long working distance objectives.
Product Details
Inventory Number: 64819
Retail (USD):
$19,000.00
Now (USD):
$19,000.00
Steag (AG Associates) Heatpulse 610 RTP Rapid Thermal Processing System. Manually loaded and capable of processing silicon and III-V substrates up to 150mm in diameter, Heatpulse 610 provides solutions to your process development and monitoring needs. Benchtop system for rapid thermal processing of semiconductor wafers up to 6” dia. max. (Depends on wafer tray with system).
Performance Specifications
- Recommended Steady State Temperature Range: 400-1250° C.
- Steady-State Temperature Stability: ± 2° C.
- Temperature Monitoring Mechanisms: Extended Range Pyrometer (ERP), used throughout the recommended temperature range, or a thermocouple, used for process temperatures below 400° C.
- Heating Rate: 1-200° C per second, user-controllable.
- Cooling Rate: Temperature dependent; max 150° C per second.
- Maximum Non-uniformity:
- ±5°C across a 6″ (150mm) wafer at 1150°C. (This is a one sigma deviation 100 angstrom oxide.) For a titanium silicidation process, no more than 4% increase in non-uniformity during the first anneal at 650°C to 700 °C.
- Post-anneal sheet resistivity measured on a 150mm wafer annealed at 1100° C for 10 seconds. R&D models optimized for slip control.
- Implant: As 1E16 50 KeV with implant uniformity ≤0.3%
Product Details
Inventory Number: 64582
Retail (USD):
$8,500.00
Now (USD):
$8,500.00
Semitool STI 870 Spin Rinser Dryer Double Stack. 6” Wafer Rotor in the top spinner and a 4" Rotor in the bottom spinner. High performance cleaning, rinsing and drying system for 25 wafer batch cassette. This system is capable of cleaning substrates from 2” to 6” round if the correct Rotor is installed for that wafer size. On axis orientation keeps wafers parallel allowing DI water manifolds to spray both sides of product continuously and simultaneously. Built in resistivity monitor. 120V, 50/60 Hz,
Product Details
Inventory Number: 64585
Retail (USD):
$2,950.00
Now (USD):
$2,950.00
Semitool STI ST 260 Spin Rinser Dryer. High performance cleaning, rinsing and drying system for 25 wafer batch cassette. Currently configured with Rotor for 2” wafers. This system is capable of cleaning substrates from 2” to 5” round if the correct Rotor is installed for that wafer size. On axis orientation keeps wafers parallel allowing DI water manifolds to spray both sides of product continuously and simultaneously. Built in resistivity monitor. 120V, 50/60 Hz,
Product Details
Inventory Number: 64607
Retail (USD):
$11,000.00
Now (USD):
$11,000.00
Sunic Systems OLED Vacuum Deposition Chamber. Chamber came from a cluster tool that was producing OLED devices. This chamber was designated Metal Chamber. There are 4 deposition sources in the chamber. The chamber also includes an Ulvac Cryopump and compressor. The inside dimensions are 22"W x 25"D x 32"H. Chamber is being sold as is where is, we cannot test this item.
Product Details
Inventory Number: 64608
Retail (USD):
$11,000.00
Now (USD):
$11,000.00
Sunic Systems OLED Vacuum Deposition Chamber. Chamber came from a cluster tool that was producing OLED devices. This chamber was designated Organic Chamber. There are 10 deposition sources in the chamber. The chamber also includes an Ulvac Cryopump and compressor. The inside dimensions are 25"W x 29"D x 27"H. Chamber is being sold as is where is, we cannot test this item.
Product Details
Inventory Number: 64609
Retail (USD):
$11,000.00
Now (USD):
$11,000.00
Sunic Systems OLED Vacuum Deposition Chamber. Chamber came from a cluster tool that was producing OLED devices. This chamber was designated Organic Chamber. There are 10 deposition sources in the chamber. The chamber also includes an Ulvac Cryopump and compressor. The inside dimensions are 25"W x 29"D x 27"H. Chamber is being sold as is where is, we cannot test this item.
Product Details
Inventory Number: 64583
Retail (USD):
$1,350.00
Now (USD):
$1,350.00
TEK-TEMP TKD-100/4000 Air Cooled Refrigerated Recirculating Chiller. Cooling capacity 4000 BTU/Hr at 20°C. Pump capacity 4.3gpm with a pressure from 0 to 60 psi. Digital setpoint readout. Temperature range of 5°C to 35°C. 208V, 1Ph, 50/60Hz
Product Details
Inventory Number: 64872
Retail (USD):
$7,950.00
Now (USD):
$7,950.00
Tenney BTRC Temperature and Humidity Test Chamber. Environmental temperature humidity system. Color LDC screen controller with real time graphic displays. RS232 data communications. Temperature Range: -70°C to +200°C. Humidity range 20% to 98% rh. Non CFC refrigerants. Inside Dimensions: 20” L x 19.5” W x 22” H. 1-inch and 2-inch cable ports on side. 240V, 1 Ph, 60 Hz, 23A
Product Details