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Wafer Analysis

Used Veeco Dektak 6M

Inventory Number: 61710
Now (USD): $15,000.00

Surface Profiler High Precision R&D Measurement Tool. Delivers a unique combination of precise measurements, ease of use and simplicity of design all in a compact, economical package. Low-inertia sensor technology improves measurement repeatability. Programmable stylus force down to 1 milligram enables scanning on soft surfaces. Vertical range up to 262 microns measures large steps for MEMS applications. With 10 angstrom, 1 sigma step height repeatability the Dektak 6M provides the flexibility to perform precise step height measurements for thin films down to less than 100 angstroms as well as thick-film measurements up to several hundred microns thick. Long-scans up to 30mm. Extremely stable baseline. Up to 30,000 data points per scan. 120V, 60 Hz, CE.

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Used Veeco Dektak 3

Inventory Number: 61949
Now (USD): $8,950.00

Surface Profiler. Surface profile measuring system. Measures step height, surface roughness, waviness and curvature. High precision measurement for a broad range of applications. Sample Stage: 5 in. dia. Scan Length: 50 micrometers to 30mm. X-Y Stage Translation: 20mm to 80mm. Sensitivity to measure step heights below 100 angstroms. 120V, 60 Hz.

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Used Wyko BP2000W

Inventory Number: 39319
Now (USD): $39,000.00

Bump Measurement Profiling System. The right inspection tool for flip-chip process control. Repeatably measures solder bump heights, from 150 micro-meters or more for standard flip-chip bumps down to a few microns for under-bump metalization pads, as well as provides volume data on all bump sizes. Non-contact 3-D data on all size bumps over the entire wafer. The system calculates bump height, width, volume and coplanarity. Automatically detects bump position, solder bridges, and missing and extra solder bumps, with prominent display of pass/fail results and position statistics at the bump, die,wafer and lot level. Powerful measurement analysis, generating output as 2-D cross sections, contour plots, bearing ratio plots, or 3-D images. A built in Wizard allows quick measurement set-up.

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Used Wyko Profiler

Inventory Number: 61243
Now (USD): $2,950.00

Noncontact Profiler. Sold As Is untested for parts or a project machine. We have not powered the system. Two objectives: IX50 and IX5.

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Used Zygo SXM300

Inventory Number: 46204
Now (USD): $12,500.00

Multimode Scanning Probe Microscope. The Magnascope SXM300 is a multimode probe microscope that measures sub-micron features to near angstrom-level resolution. It is designed for critical-dimension measurements of height, width, roughness and sidewall angles of 300mm wafers and masks of up to 9 in x 9 in. Sold As Is.

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Used Zygo 5600

Inventory Number: 29714
Now (USD): $2,500.00

Maxim 3D Laser Interferometric Microscope. PARTS SYSTEM.

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Used Zygo New View 6300

Inventory Number: 61968
Now (USD): $59,000.00

High Performance 3D Optical Surface Profiler. The Zygo Optical Profiler is a powerful tool for characterizing and quantifying surface roughness, step heights, critical dimensions and other topographical features. All measurements are nondestructive, non-contact, fast, and do not require sample preparation. The system analyzes a wide range of surfaces including smooth, rough, flat sloped and stepped, and provides profile heights ranging from sub-nanometer to millimeters at high speeds. Measurement Technique: Non-contact, three-dimensional, scanning white light and optical phase-shifting interferometry. Scanner: Closed-loop piezo-based with highly linear capacitive sensors. Focus: Motorized and auto focus. 100-240V, 50/60 Hz, CE.

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