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Wafer Analysis

Used JMAR S2610-01

Inventory Number: 50626
Now (USD): $6,000.00

Non-Contact Automatic 3-Axis Tabletop Measurement System. JMAR Video CMM® software. Supports high magnification microscope optics. Three channel computer controlled light source. X-Y stage travel: 10 in. x 4 in. 115V, 60 Hz. Mfg. 2001.

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Used KLA Tencor 5200

Inventory Number: 61777
Now (USD): $49,000.00

Automated Overlay Metrology Tool. Just removed from a 100mm, 4 in. research facility. Was fully functional when shut down for removal.

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Used Metricon PC-200

Inventory Number: 49158
Now (USD): $2,950.00

Prism Coupler. For measurement of thin film thickness and refractive index.

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Used Metricon PC-2000

Inventory Number: 54118
Now (USD): $2,950.00

Thin Film Thickness and Refractive Index Measurement System. Unparalleled accuracy in measurement of thin film thickness, refractive index and bulk refractive index. Prism coupler instrument. 115V, 60 Hz.

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Used Nanometrics 8300X

Inventory Number: 59620
Now (USD): $21,500.00

Thin Film Metrology Tool. Unit gives robot error when powered up. Can accommodate 300mm wafers. Film thickness measurement system. Sold As Is.

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Used Nanometrics Nanospec 6100

Inventory Number: 62025
Now (USD): $39,000.00

Automated Film Thickness Measurement System. Tabletop film thickness measurement and mapping tool. Designed to measure the thickness of films deposited on various substrates including those used in semiconductor and magnetic head fabrication. Uses non-contact spectroreflectometry on sites as small as 10 micrometers. A computer sample stage and a robust autofocus system allows the automatic generation of film thickness uniformity maps. 115V, 50/60 Hz, 5A.

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Used Philips PLM-100

Inventory Number: 48787
Now (USD): $22,500.00

Photoluminescence Mapping Tool. For process control, analysis of band-gap, ternary layer composition, layer thickness and crystal perfection.

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Used Rudolph Auto El III

Inventory Number: 59156
Now (USD): $4,950.00

Ellipsometer. Displays film thickness, index, order thickness, substrate N and K on transparent films. Max. Sample Size: 6 in. x 6 in. Variable angle of incidence, manual adjust. Single Wavelength: 632.8nm. Null seeking operating principle.

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Used SSEC M3302

Inventory Number: 60584
Now (USD): $125,000.00

Single Wafer Chemical Etch Processor. • Currently configured for 8 in./200mm. • Mfg. Date: 2013. • Model M3302 - (2) process modules. • Install Type: Through-the-wall (TTW). • CE Marked. • Dry-In / Dry Out Operation. • Factory Interface with mini-environment. • (4) 8 in. (200mm) Cassette Stations. • Automatic Load/Unload. Note: Cassette station No. 3 dedicated to Cu. • Wafer Aligner. • (4) End-effecter Wafer Handling Robot. • Application: BEOL. • Process Module-1: Non-Cu (General Purpose). • Process Module-2: Cu dedicated. • SECS/GEM Interface. • Safety: INTLK/Comm.: H2SO4/H2O2. • INTLK/Comm.: HF. • Facility Requirements: CDA, N2, DIW, HF (10:1), Sulfuric (97 percent), Hydrogen Peroxide (30 percent). • Power: 208VAC, 20A, Single Phase, 60Hz. • Was operational when deinstalled.

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Used Sun International Sopra GESP-5

Inventory Number: 58885
Now (USD): $21,500.00

Variable Angle Broadband Spectroscopic Ellipsometer. Ellipsometer for complicated film stacks, mapping film thickness and optical properties. Has PMT detector. Wavelength: 250nm to 850nm. User friendly Windows® based interface. SOPRA ellipsometer that had been serviced by Angstrom Sun Technologies. Allows for variable angle broadband spectroscopic ellipsometry. Motorized 8 in. stage for 3D sample plots. Camera with zoom lens.

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