Vacuum Valves - Chambers - Systems

Sunic Systems OLED Vacuum Deposition Chamber. Chamber came from a cluster tool that was producing OLED devices. This chamber was designated Organic Chamber. There are 10 deposition sources in the chamber. The chamber also includes an Ulvac Cryopump and compressor. The inside dimensions are 25"W x 29"D x 27"H. Chamber is being sold as is where is, we cannot test this item.

Tylan General MDVX-160BS05 Motor Driven Throttle Valve. No Controller. ISO-160 flange. 8-7/8 in. O.D.,6 in. I.D. 8 holes 7-7/8 in. on center.

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 34"H. There are currently THREE deposition soucres wired inside the chamber. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Chamber sold as is not tested. THE LARGE SOURCE IN THE PHOTOS HAS BEEN REMOVED AND IS NOT AVAILABLE!

Ulvac High Vacuum Elevator Chamber. Stainless steel Vacuum chamber with port on top for high vacuum pump- previously had a CTI 8F which was sold separately. Has a slot valve that was used to pass substrates in and out of the chamber. Sold as is not tested. In very good condition. Inside dimensions 19.5"W x 18.5"D x 48"H

Ulvac Stainless Vacuum Chamber. Vacuum chamber previously used on a cluster tool producing OLED modules. Inside of chamber is 30"W x 30"D x 30"H. There is a 16"ID poppet valve with a CVC style flange that had been used for a CTI 400 cryopump which was removed and sold separately. There is a slot valve that was used to pass substrates to the rotating substrate fixture inside the chamber. Multiple shutter actuators and feed throughs on bottom of chamber. Crystal sensors. Chamber in nice condition. Chamber sold as is not tested.

UHV Surface Science Vacuum Chamber. Chamber size 11.75" Diameter. Bottom flange is 8" OD conflat. Side flange is 10"OD conflat. One 8" OD conflat on side. Two 6" OD conflat flanges. Four 4.5" OD conflats. Nine 2.75"OD conflats.

Varian 951-5090 Valve. Air operated. 2-3/4 in. OD conflat.

VAT Gate Valve. Stainless Steel MONVAT Series 02. Transfer valve for process systems. Double acting, pneumatic actuator. Air operated. ID: 8-1/4 in. x 2 in. Sealed bellows, solenoid, Viton. Pressure Range: 1.10^-9 mbar to 1.2 bar.

VAT Rectangular Gate Valve. 10 in. x 1 in. opening. 11 in. x 2-1/8 in. O-Ring. Air actuated.

VAT Gate Valve. Large stainless steel gate valve.  14 in. OD conflat flange. CE marking. Rebuilt by Manufacturer.