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Vacuum Parts & Controls

Used Sigma Instruments SID-142

Inventory Number: 51308
Now (USD): $3,950.00

Multi Channel Thin Film Deposition Controller. Controller only. PC based thin film controller.

Product Details

Used SMC CRB1BW20-180S

Inventory Number: 59006
Now (USD): $100.00

Rotary Actuator. 2.5 in. OD conflat flange. Vane Type. Overall Length: Approx. 8 in.

Product Details

Used Surface Interface DBLRP-36

Inventory Number: 61551
Now (USD): $350.00

Precision Magnetic Manipulator Transfer System. 2-3/4 in. OD conflat flange.

Product Details

Used Unit Instruments UFC 1560A

Inventory Number: 59702
Now (USD): $495.00

Mass Flow Control Assembly.  $495 each

Qty. 1 - 1560A - 20 SCCM - HBR.

Qty. 1 - 1560A - 25 SCCM - O2.

Product Details

Used Unit Instruments DX-5

Inventory Number: 50377
Now (USD): $1,250.00

5 Channel Mass Flow Control System. Capable of controlling up to five mass flow controllers or meters and one pressure controller. Setpoint and output are shown as a percentage of full scale on the blue/white touch screen display. User friendly menu screens enable configuration on each channel. 115V, 60 Hz. 10 Available.

Product Details

Used Unit Instruments 3165

Inventory Number: 50902
Now (USD): $250.00

Mass Flow Controller. N2 100 SCCM. NEVER USED.  6 Available.

Product Details

Used Unit Instruments 1665

Inventory Number: 50909
Now (USD): $250.00

Mass Flow Controller. NH3 2 SLM. NEVER USED.  2 Available.

Product Details

Used Unit Instruments DX-5 with 2 MFC

Inventory Number: 52413
Now (USD): $1,350.00

5 Channel Mass Flow Control System with 2 MFC. Capable of controlling up to 5 mass flow controllers or meters and 1 pressure controller. Comes with 2 MFC; 1 - UFC-8100: O2 100 SCCM and 1 - C3H8: 50 SCCM and cables. User friendly menu screens enable configuration on each channel. 115V, 60 Hz. 5 Available.

Product Details

Used Unit Instruments UFC-3165

Inventory Number: 52597
Now (USD): $250.00

Mass Flow Controller. 80L NH3. VCR fittings. CE.  3 Available.

Product Details

Used Unit Instruments 1665

Inventory Number: 54543
Now (USD): $250.00

Mass Flow Controller. NH3 2 SLPM. Device net connector. CE.  2 Available.

Product Details